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ZnO Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing ZnO films returned 73 record(s).

NumberTitle
1A high speed PE-ALD ZnO Schottky diode rectifier with low interface-state density
2Schottky Diodes on ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
3Radical Enhanced Atomic Layer Deposition of Metals and Oxides
4Enhanced electron field emission properties of high aspect ratio silicon nanowire-zinc oxide core-shell arrays
5Plasma-Modified Atomic Layer Deposition
6Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc
7Bipolar resistive switching characteristics of low temperature grown ZnO thin films by plasma-enhanced atomic layer deposition
8Fabrication of Si3N4-Based Artificial Basilar Membrane with ZnO Nanopillar Using MEMS Process
9Oxide semiconductor thin film transistors on thin solution-cast flexible substrates
10Electrical Characterization of Metal-Insulator-Semiconductor Capacitors Having Double-Layered Atomic-Layer-Deposited Al2O3 and ZnO for Transparent Thin Film Transistor Applications
11Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
12Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study
13ZnO Thin Films Fabricated by Plasma-Assisted Atomic Layer Deposition
14Growth of controllable ZnO film by atomic layer deposition technique via inductively coupled plasma treatment
15Low-Power Double-Gate ZnO TFT Active Rectifier
16Plasma enhanced atomic layer deposition of ZnO with diethyl zinc and oxygen plasma: Effect of precursor decomposition
17Growth of amorphous zinc tin oxide films using plasma-enhanced atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin, diethylzinc, and oxygen plasma
18New approach toward transparent and conductive ZnO by atomic layer deposition: Hydrogen plasma doping
19Initial Growth and Crystallization Onset of Plasma Enhanced-Atomic Layer Deposited ZnO
20Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition
21ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition: Material Properties Within and Outside the "Atomic Layer Deposition Window"
22Inhibiting Metal Oxide Atomic Layer Deposition: Beyond Zinc Oxide
23Structural, optical, electrical and resistive switching properties of ZnO thin films deposited by thermal and plasma-enhanced atomic layer deposition
24Flexible Technologies for Self-Powered Wearable Health and Environmental Sensing
25Fast Flexible Plastic Substrate ZnO Circuits
26Photochemical Reaction Patterns on Heterostructures of ZnO on Periodically Poled Lithium Niobate
27Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
28Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
29Tailoring Electron-Transfer Barriers for Zinc Oxide/C60 Fullerene Interfaces
30Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
31Effect of hydrogen peroxide pretreatment on ZnO-based metal-semiconductor-metal ultraviolet photodetectors deposited using plasma-enhanced atomic layer deposition
32Comparison between ZnO films grown by plasma-assisted atomic layer deposition using H2O plasma and O2 plasma as oxidant
33Top-down fabricated ZnO nanowire transistors for application in biosensors
34Electrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD
35Effect of Process Parameters on Remote PEALD for Highly Transparent ZnO Film Growth
36Al2O3 and SiO2 Atomic Layer Deposition Layers on ZnO Photoanodes and Degradation Mechanisms
37Sustained hole inversion layer in a wide-bandgap metal-oxide semiconductor with enhanced tunnel current
38Metal-oxide-based hole-selective tunneling contacts for crystalline silicon solar cells
39Spectroscopy and control of near-surface defects in conductive thin film ZnO
40Efficient Modification of Metal Oxide Surfaces with Phosphonic Acids by Spray Coating
41Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
42Influence of Precursor Density and Conversion Time on the Orientation of Vapor-Deposited ZIF-8
43Room-temperature plasma-enhanced atomic layer deposition of ZnO: Film growth dependence on the PEALD reactor configuration
44Self-limiting deposition of semiconducting ZnO by pulsed plasma-enhanced chemical vapor deposition
45Plasma enhanced atomic layer deposition and laser plasma deposition of ultra-thin ZnO films for Schottky barrier devices
46Highly Tunable Electrical Properties in Undoped ZnO Grown by Plasma Enhanced Thermal-ALD
47Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications
48From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications
49Oxide TFT LC Oscillators on Glass and Plastic for Wireless Functions in Large-Area Flexible Electronic Systems
50Employing Overlayers To Improve the Performance of Cu2BaSnS4 Thin Film based Photoelectrochemical Water Reduction Devices
51Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
52Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions
53Synaptic Plasticity and Learning Behaviors Mimicked in Single Inorganic Synapses of Pt/HfOx/ZnOx/TiN Memristive System
54Characteristics of ZnO Thin Films by Means of Plasma-Enhanced Atomic Layer Deposition
55The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges
56All-oxide thin-film transistors with channels of mixed InOx-ZnOy formed by plasma-enhanced atomic layer deposition process
57Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers
58Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
59Disrupted Attosecond Charge Carrier Delocalization at a Hybrid Organic/Inorganic Semiconductor Interface
60Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature
61The effect of oxygen remote plasma treatment on ZnO TFTs fabricated by atomic layer deposition
62The "Pure Marriage" between 3D Printing and Well-Ordered Nanoarrays by Using PEALD Assisted Hydrothermal Surface Engineering
63The Effects of an O2 Plasma on the Optical Properties of Atomic Layer Deposited ZnO
64Hysteresis behaviour of top-down fabricated ZnO nanowire transistors
65Tuning of undoped ZnO thin film via plasma enhanced atomic layer deposition and its application for an inverted polymer solar cell
66Fast PEALD ZnO Thin-Film Transistor Circuits
67Forming-free resistive switching of tunable ZnO films grown by atomic layer deposition
68Fabrication and Characterization of Flexible Thin Film Transistors on Thin Solution-Cast Substrates
69Self-aligned ZnO thin-film transistors with 860 MHz fT and 2 GHz fmax for large-area applications
70The Effects of UV Exposure on Plasma-Enhanced Atomic Layer Deposition ZnO Thin Film Transistor
71Effect of in situ hydrogen plasma treatment on zinc oxide grown using low temperature atomic layer deposition
72Performance of Nanocrystal ZnO Thin-Film Schottky Contacts on Cu by Atomic Layer Deposition
73P-type Conductivity of MgZnO:(N:Ga) Thin Films Prepared by Remote Plasma In-Situ Atomic Layer Doping