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ZnO Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing ZnO films returned 73 record(s).

NumberTitle
1Tailoring Electron-Transfer Barriers for Zinc Oxide/C60 Fullerene Interfaces
2Schottky Diodes on ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
3Inhibiting Metal Oxide Atomic Layer Deposition: Beyond Zinc Oxide
4The effect of oxygen remote plasma treatment on ZnO TFTs fabricated by atomic layer deposition
5Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study
6Fabrication of Si3N4-Based Artificial Basilar Membrane with ZnO Nanopillar Using MEMS Process
7Hysteresis behaviour of top-down fabricated ZnO nanowire transistors
8Comparison between ZnO films grown by plasma-assisted atomic layer deposition using H2O plasma and O2 plasma as oxidant
9Effect of Process Parameters on Remote PEALD for Highly Transparent ZnO Film Growth
10Characteristics of ZnO Thin Films by Means of Plasma-Enhanced Atomic Layer Deposition
11Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
12Self-limiting deposition of semiconducting ZnO by pulsed plasma-enhanced chemical vapor deposition
13Fast PEALD ZnO Thin-Film Transistor Circuits
14A high speed PE-ALD ZnO Schottky diode rectifier with low interface-state density
15Employing Overlayers To Improve the Performance of Cu2BaSnS4 Thin Film based Photoelectrochemical Water Reduction Devices
16New approach toward transparent and conductive ZnO by atomic layer deposition: Hydrogen plasma doping
17Enhanced electron field emission properties of high aspect ratio silicon nanowire-zinc oxide core-shell arrays
18From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications
19Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
20Fast Flexible Plastic Substrate ZnO Circuits
21Effect of hydrogen peroxide pretreatment on ZnO-based metal-semiconductor-metal ultraviolet photodetectors deposited using plasma-enhanced atomic layer deposition
22Electrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD
23Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature
24Flexible Technologies for Self-Powered Wearable Health and Environmental Sensing
25Self-aligned ZnO thin-film transistors with 860 MHz fT and 2 GHz fmax for large-area applications
26Efficient Modification of Metal Oxide Surfaces with Phosphonic Acids by Spray Coating
27Fabrication and Characterization of Flexible Thin Film Transistors on Thin Solution-Cast Substrates
28Initial Growth and Crystallization Onset of Plasma Enhanced-Atomic Layer Deposited ZnO
29Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications
30Growth of controllable ZnO film by atomic layer deposition technique via inductively coupled plasma treatment
31Spectroscopy and control of near-surface defects in conductive thin film ZnO
32Electrical Characterization of Metal-Insulator-Semiconductor Capacitors Having Double-Layered Atomic-Layer-Deposited Al2O3 and ZnO for Transparent Thin Film Transistor Applications
33The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges
34Performance of Nanocrystal ZnO Thin-Film Schottky Contacts on Cu by Atomic Layer Deposition
35The "Pure Marriage" between 3D Printing and Well-Ordered Nanoarrays by Using PEALD Assisted Hydrothermal Surface Engineering
36Radical Enhanced Atomic Layer Deposition of Metals and Oxides
37P-type Conductivity of MgZnO:(N:Ga) Thin Films Prepared by Remote Plasma In-Situ Atomic Layer Doping
38ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition: Material Properties Within and Outside the "Atomic Layer Deposition Window"
39Room-temperature plasma-enhanced atomic layer deposition of ZnO: Film growth dependence on the PEALD reactor configuration
40Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
41Structural, optical, electrical and resistive switching properties of ZnO thin films deposited by thermal and plasma-enhanced atomic layer deposition
42Oxide semiconductor thin film transistors on thin solution-cast flexible substrates
43All-oxide thin-film transistors with channels of mixed InOx-ZnOy formed by plasma-enhanced atomic layer deposition process
44Sustained hole inversion layer in a wide-bandgap metal-oxide semiconductor with enhanced tunnel current
45Highly Tunable Electrical Properties in Undoped ZnO Grown by Plasma Enhanced Thermal-ALD
46The Effects of an O2 Plasma on the Optical Properties of Atomic Layer Deposited ZnO
47Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc
48Tuning of undoped ZnO thin film via plasma enhanced atomic layer deposition and its application for an inverted polymer solar cell
49Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
50Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
51Oxide TFT LC Oscillators on Glass and Plastic for Wireless Functions in Large-Area Flexible Electronic Systems
52Synaptic Plasticity and Learning Behaviors Mimicked in Single Inorganic Synapses of Pt/HfOx/ZnOx/TiN Memristive System
53Growth of amorphous zinc tin oxide films using plasma-enhanced atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin, diethylzinc, and oxygen plasma
54The Effects of UV Exposure on Plasma-Enhanced Atomic Layer Deposition ZnO Thin Film Transistor
55Plasma enhanced atomic layer deposition of ZnO with diethyl zinc and oxygen plasma: Effect of precursor decomposition
56Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers
57Al2O3 and SiO2 Atomic Layer Deposition Layers on ZnO Photoanodes and Degradation Mechanisms
58Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
59Disrupted Attosecond Charge Carrier Delocalization at a Hybrid Organic/Inorganic Semiconductor Interface
60Low-Power Double-Gate ZnO TFT Active Rectifier
61Effect of in situ hydrogen plasma treatment on zinc oxide grown using low temperature atomic layer deposition
62Bipolar resistive switching characteristics of low temperature grown ZnO thin films by plasma-enhanced atomic layer deposition
63ZnO Thin Films Fabricated by Plasma-Assisted Atomic Layer Deposition
64Forming-free resistive switching of tunable ZnO films grown by atomic layer deposition
65Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions
66Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
67Plasma-Modified Atomic Layer Deposition
68Plasma enhanced atomic layer deposition and laser plasma deposition of ultra-thin ZnO films for Schottky barrier devices
69Photochemical Reaction Patterns on Heterostructures of ZnO on Periodically Poled Lithium Niobate
70Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition
71Metal-oxide-based hole-selective tunneling contacts for crystalline silicon solar cells
72Top-down fabricated ZnO nanowire transistors for application in biosensors
73Influence of Precursor Density and Conversion Time on the Orientation of Vapor-Deposited ZIF-8