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Fabrication of Si3N4-Based Artificial Basilar Membrane with ZnO Nanopillar Using MEMS Process

Type:
Journal
Info:
Journal of Sensors Volume 2017, Article ID 1308217, 11 pages
Date:
2017-05-31
DOI:
https://doi.org/10.1155/2017/1308217

Author Information

Name Institution
Jun-Hyuk KwakCenter for Advanced Meta-Materials
Youngdo JungKorea Institute of Machinery and Materials
Kyungjun SongKorea Institute of Machinery and Materials
Shin HurKorea Institute of Machinery and Materials

Films

Plasma ZnO

Hardware used: Unknown
Deposition Temperature Range N/A

Film/Plasma Properties

Substrates

Polyimide

Notes

1050