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Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition

Type:
Journal
Info:
Nanoscale Research Letters (2017) 12:541
Date:
2017-09-08
DOI:
http://dx.doi.org/10.1186/s11671-017-2308-1

Author Information

Name Institution
Ruomeng HuangUniversity of Southampton
Sheng YeUniversity of Southampton
Kai SunUniversity of Southampton
Kian S. KiangUniversity of Southampton
C.H. de GrootUniversity of Southampton

Films

Thermal ZnO

Hardware used: Oxford Instruments FlexAL
DEZ, diethyl zinc, ZnEt2
CAS#: 557-20-0
H2O, Water
CAS#: 7732-18-5
Deposition Temperature = 190C

Other ZnO

Hardware used: Oxford Instruments FlexAL
DEZ, diethyl zinc, ZnEt2
CAS#: 557-20-0
H2O, Water
CAS#: 7732-18-5
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 190C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000

Characteristic: Refractive Index
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000

Characteristic: Extinction Coefficient
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000

Characteristic: Resistivity, Sheet Resistance
Analysis: Hall Measurements
Diagnostic: Nanometrics HL5500

Characteristic: Carrier Concentration
Analysis: Hall Measurements
Diagnostic: Nanometrics HL5500

Characteristic: Mobility
Analysis: Hall Measurements
Diagnostic: Nanometrics HL5500

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: Rigaku Smartlab

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo VG-Scientific theta probe

Characteristic: VCPD - Contact Potential Difference
Analysis: Scanning Kelvin Probe Microscopy (SKPM)
Diagnostic: Nanonics CV2000

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: -

Substrates

SiO2

Notes

1080