Inductively coupled plasma sources from Plasma ALD, LLC.


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Kai Sun Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kai Sun returned 2 record(s).

NumberTitle
1Forming-free resistive switching of tunable ZnO films grown by atomic layer deposition
2Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition