From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications
Type:
Journal
Info:
Small 2020, 1907506
Date:
2020-03-30
Author Information
| Name | Institution |
|---|---|
| Lukas Mai | Ruhr-University Bochum |
| Felix Mitschker | Ruhr-University Bochum |
| Claudia Bock | Ruhr-University Bochum |
| Alessia Niesen | paragon GmbH & Co |
| Engin Ciftyurek | Heinrich-Heine-University Düsseldorf |
| Detlef Rogalla | Ruhr-University Bochum |
| Johannes Mickler | paragon GmbH & Co |
| Matthias Erig | paragon GmbH & Co |
| Zheshen Li | Aarhus University |
| Peter Awakowicz | Ruhr-University Bochum |
| Klaus Schierbaum | Heinrich-Heine-University Düsseldorf |
| Anjana Devi | Ruhr-University Bochum |
Films
Film/Plasma Properties
Characteristic: Precursor Characterization
Analysis: NMR, Nuclear Magnetic Resonance
Characteristic: Precursor Characterization
Analysis: TGA, Thermo Gravimetric Analysis
Characteristic: Precursor Characterization
Analysis: Vapor Pressure
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction
Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry
Characteristic: Chemical Composition, Impurities
Analysis: NRA, Nuclear Reaction Analysis
Characteristic: Bonding States
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Transmittance
Analysis: UV-VIS Spectroscopy
Characteristic: Diffusion Barrier Properties
Analysis: Oxygen Transmission Rate (OTR)
Characteristic: Gas Sensing
Analysis: Custom
Substrates
| Si(100) |
| PET, Polyethylene Terephthalate |
Notes
| 1511 |