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Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films

Type:
Journal
Info:
Nanotechnology 26 (2015) 265702
Date:
2015-06-09
DOI:
http://dx.doi.org/10.1088/0957-4484/26/26/265702

Author Information

Name Institution
Chung-Ting KoNational Taiwan University
Po-Shuan YangNational Taiwan University
Yin-Yi HanNational Taiwan University
Wei-Cheng WangNational Taiwan University
Jhih-Jie HuangNational Taiwan University
Yen-Hui LeeNational Taiwan University
Yi-Jen TsaiNational Taiwan University
Jay ShiehNational Taiwan University
Miin-Jang ChenNational Taiwan University

Films

Thermal ZnO

Hardware used: Beneq TFS-200
DEZ, diethyl zinc, ZnEt2
CAS#: 557-20-0
H2O, Water
CAS#: 7732-18-5
Deposition Temperature = 180C

Plasma TiO2

Hardware used: Beneq TFS-200
TDMATi, tetrakis(dimethylamido)titanium, titanium dimethylamide, (Me2N)4Ti
CAS#: 3275-24-9
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 200C

Plasma ZrO2

Hardware used: Beneq TFS-200
TEMAZr, (EtMeN)4Zr, [(C2H5)(CH3)N]4Zr, Tetrakis(EthylMethylAmido) Zirconium, Zirconium Ethylmethylamide
CAS#: 175923-04-3
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 200C

Plasma Ag

Hardware used: Beneq TFS-200
Ag(FOD)(PEt3), Triethylphosphine (6,6,7,7,8,8,8- heptafluoro-2,2- dimethyl-3,5- octanedionate) silver(I)
CAS#: 165461-74-5
H2, Hydrogen
CAS#: 1333-74-0
Deposition Temperature = 120C

Film/Plasma Properties

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Diagnostic: JEOL 2100F

Characteristic: Thickness
Analysis: TEM, Transmission Electron Microscope
Diagnostic: JEOL 2100F

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: FEI Nova NanoSEM 450

Characteristic: Raman Spectra
Analysis: Raman Spectroscopy
Diagnostic: Uni-RAM

Characteristic: Optical Properties
Analysis: Optical Absorption
Diagnostic: Avantes AvaSpec-2048L

Characteristic: Refractive Index
Analysis: Ellipsometry
Diagnostic: Ellipso Technology Elli-SE

Characteristic: Extinction Coefficient
Analysis: Ellipsometry
Diagnostic: Ellipso Technology Elli-SE

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction
Diagnostic: -

Substrates

Silicon
TiO2
ZrO2

Notes

373