Inductively coupled plasma sources from Plasma ALD, LLC.


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Jay Shieh Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jay Shieh returned 3 record(s).

NumberTitle
1Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing
2Sub-7-nm textured ZrO2 with giant ferroelectricity
3Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films