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Tuning of undoped ZnO thin film via plasma enhanced atomic layer deposition and its application for an inverted polymer solar cell

Type:
Journal
Info:
AIP ADVANCES 3, 102114 (2013)
Date:
2013-09-26
DOI:
http://dx.doi.org/10.1063/1.4825230

Author Information

Name Institution
Mi-Jin JinUlsan National Institute of Science and Technology
Junhyeon JoUlsan National Institute of Science and Technology
Guru P. NeupaneSungkyunkwan University
Youngjun KimSungkyunkwan University
Ki-Seok AnKorea Research Institute of Chemical Technology
Jung-Woo YooUlsan National Institute of Science and Technology

Films

Plasma ZnO

Hardware used: SVT Associates
DEZ, diethyl zinc, ZnEt2
CAS#: 557-20-0
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 100-300C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Profilometry
Diagnostic: Tencor Alpha-Step Profilometer

Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe
Diagnostic: -

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: -

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: -

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: -

Characteristic: Photoluminescence
Analysis: PL, PhotoLuminescence
Diagnostic: -

Characteristic: Open Circuit Voltage
Analysis: I-V, Current-Voltage Measurements
Diagnostic: Abet Solar Simulator

Characteristic: Short Circuit Current
Analysis: I-V, Current-Voltage Measurements
Diagnostic: Abet Solar Simulator

Characteristic: Fill Factor
Analysis: I-V, Current-Voltage Measurements
Diagnostic: Abet Solar Simulator

Characteristic: Efficiency
Analysis: I-V, Current-Voltage Measurements
Diagnostic: Abet Solar Simulator

Substrates

ITO

Notes

603