Oxide semiconductor thin film transistors on thin solution-cast flexible substrates
Type:
Journal
Info:
IEEE Electron Device Letters (Volume: 36, Issue: 1)
Date:
2014-12-22
Author Information
| Name | Institution |
|---|---|
| H. U. Li | The Pennsylvania State University |
Films
Plasma ZnO
Film/Plasma Properties
Substrates
| Polyimide |
Notes
| PEALD Al2O3 and ZnO for flexible electronics. |
| 272 |