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P-type Conductivity of MgZnO:(N:Ga) Thin Films Prepared by Remote Plasma In-Situ Atomic Layer Doping

Type:
Journal
Info:
ECS J. Solid State Sci. Technol. 2013 volume 2, issue 11, R249-R253
Date:
2013-09-13
DOI:
http://dx.doi.org/10.1149/2.030311jss

Author Information

Name Institution
Jui-Fen ChienNational Taiwan University
Huan-Yu ShihNational Taiwan University
Hua-Yang LiaoAcademia Sinica
Ray-Ming LinChang Gung University
Jing-Jong ShyueNational Taiwan University
Miin-Jang ChenNational Taiwan University

Films

Thermal ZnO

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
DEZ, diethyl zinc, ZnEt2
CAS#: 557-20-0
H2O, Water
CAS#: 7732-18-5
Deposition Temperature = 150C

Other ZnON

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
DEZ, diethyl zinc, ZnEt2
CAS#: 557-20-0
H2O, Water
CAS#: 7732-18-5
NH3, Ammonia
CAS#: 7664-41-7
H2, Hydrogen
CAS#: 1333-74-0
Deposition Temperature = 150C

Other ZnO:(N:Ga)

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
DEZ, diethyl zinc, ZnEt2
CAS#: 557-20-0
TEG, triethyl galium, GaEt3
CAS#: 1115-99-7
H2O, Water
CAS#: 7732-18-5
NH3, Ammonia
CAS#: 7664-41-7
H2, Hydrogen
CAS#: 1333-74-0
Deposition Temperature = 150C

Other MgZnO:(N:Ga)

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
DEZ, diethyl zinc, ZnEt2
CAS#: 557-20-0
H2O, Water
CAS#: 7732-18-5
bis(cyclopentadienyl)Magnesium, MgCp2
CAS#: 1284-72-6
TEG, triethyl galium, GaEt3
CAS#: 1115-99-7
NH3, Ammonia
CAS#: 7664-41-7
H2, Hydrogen
CAS#: 1333-74-0
Deposition Temperature = 150C

Film/Plasma Properties

Characteristic: Carrier Concentration
Analysis: Hall effect/van der Pauw method
Diagnostic: Ecopia HMS-3000

Characteristic: Conductivity Type
Analysis: Hall effect/van der Pauw method
Diagnostic: Ecopia HMS-3000

Characteristic: Bonding States
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: PHI VersaProbe 5000

Characteristic: Compositional Depth Profiling
Analysis: TOF-SIMS, Time of Flight Secondary Ion Mass Spectrometry
Diagnostic: PHI VersaProbe 5000

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: PANalytical Xpert PRO MPD X-ray Diffractometer

Characteristic: Photoluminescence
Analysis: PL, PhotoLuminescence
Diagnostic: Custom

Substrates

Sapphire

Notes

1377