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Characteristics of ALD-GZO Films with Driven-in Zn and Zn/Mg Sources for the Applications to Optoelectronic Devices

Type:
Journal
Info:
ECS J. Solid State Sci. Technol. 2014 volume 3, issue 5, P159-P162
Date:
2014-03-18
DOI:
http://dx.doi.org/10.1149/2.024405jss

Author Information

Name Institution
Chi-Chen HuangNational Tsing Hua University
Chong-Lung HoNational Tsing Hua University
Shang-Fu ChenNational Tsing Hua University
Yung-Fu ChangNational Tsing Hua University
Meng-Chyi WuNational Tsing Hua University

Films

Thermal Ga:ZnO

Hardware used: Unknown
DEZ, diethyl zinc, ZnEt2
CAS#: 557-20-0
TEG, triethyl galium, GaEt3
CAS#: 1115-99-7
H2O, Water
CAS#: 7732-18-5
Deposition Temperature = 300C

Plasma Ga:ZnO

Hardware used: Unknown
DEZ, diethyl zinc, ZnEt2
CAS#: 557-20-0
TEG, triethyl galium, GaEt3
CAS#: 1115-99-7
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 300C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Profilometry
Diagnostic: Tencor Alpha-Step Profilometer

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: -

Characteristic: Resistivity, Sheet Resistance
Analysis: Hall Measurements
Diagnostic: -

Characteristic: Carrier Concentration
Analysis: Hall Measurements
Diagnostic: -

Characteristic: Mobility
Analysis: Hall Measurements
Diagnostic: -

Characteristic: Transmittance
Analysis: Optical Transmission
Diagnostic: -

Characteristic: Optical Absorption
Analysis: Optical Absorption
Diagnostic: -

Characteristic: LED Light Emission
Analysis: Custom
Diagnostic: Custom

Characteristic: Dark Current
Analysis: I-V, Current-Voltage Measurements
Diagnostic: -

Characteristic: Photocurrent
Analysis: I-V, Current-Voltage Measurements
Diagnostic: -

Characteristic: Capacitance
Analysis: C-V, Capacitance-Voltage Measurements
Diagnostic: -

Substrates

Sapphire

Notes

1383