Inductively coupled plasma sources from Plasma ALD, LLC.


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Yung-Fu Chang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yung-Fu Chang returned 1 record(s).

NumberTitle
1Characteristics of ALD-GZO Films with Driven-in Zn and Zn/Mg Sources for the Applications to Optoelectronic Devices