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Synthesis of single-walled carbon nanotubes from atomic-layer-deposited Co3O4 and Co3O4/Fe2O3 catalyst films

Type:
Journal
Info:
Carbon 121 (2017) 389-398
Date:
2017-06-01
DOI:
https://doi.org/10.1016/j.carbon.2017.06.001

Author Information

Name Institution
Nick F. W. ThissenEindhoven University of Technology
Marcel A. VerheijenEindhoven University of Technology
R. G. HoubenEindhoven University of Technology
C. van der MarelPhilips
Erwin (W.M.M.) KesselsEindhoven University of Technology
Ageeth A. BolEindhoven University of Technology

Films

Plasma CoOx

Hardware used: Custom Remote Inductively Coupled Plasma
cobaltacene, bis(cyclopentadienyl)cobalt, Cp2Co
CAS#: 1277-43-6
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 100-200C

Plasma Fe2O3

Hardware used: Custom Remote Inductively Coupled Plasma
t-Butylferrocene, (TBF), (t-BuCp)2Fe
CAS#: 1316-98-9
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 300C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: FEI Nova 600i Nanolab

Characteristic: Raman Spectra
Analysis: Raman Spectroscopy
Diagnostic: Renishaw Invia Raman

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Diagnostic: JEOL JEM ARM 200

Substrates

SiO2

Notes

1130