Inductively coupled plasma sources from Plasma ALD, LLC.


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R. G. Houben Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by R. G. Houben returned 1 record(s).

NumberTitle
1Synthesis of single-walled carbon nanotubes from atomic-layer-deposited Co3O4 and Co3O4/Fe2O3 catalyst films