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Controlling transition metal atomic ordering in two-dimensional Mo1-xWxS2 alloys

Type:
Journal
Info:
2D Materials 9 (2022) 025016
Date:
2022-02-14
DOI:
http://dx.doi.org/10.1088/2053-1583/ac54ef

Author Information

Name Institution
Jeff J P M SchulpenEindhoven University of Technology
Marcel A. VerheijenEindhoven University of Technology
Erwin (W.M.M.) KesselsEindhoven University of Technology
Vincent VandalonEindhoven University of Technology
Ageeth A. BolEindhoven University of Technology

Films

Plasma MoS2

Hardware used: Oxford Instruments FlexAL
Bis(t-butylimido)bis(dimethylamino)molybdenum
CAS#: 923956-62-1
H2S, Hydrogen Sulfide
CAS#: 7783-06-4
Deposition Temperature = 350C

Plasma WS2

Hardware used: Oxford Instruments FlexAL
BTBMW, TBIDMW, bis(t-Butylimido) bis(DiMethylamido) Tungsten
CAS#: 406462-43-9
H2S, Hydrogen Sulfide
CAS#: 7783-06-4
Deposition Temperature = 350C

Plasma MoxW1-xS2

Hardware used: Oxford Instruments FlexAL
Bis(t-butylimido)bis(dimethylamino)molybdenum
CAS#: 923956-62-1
BTBMW, TBIDMW, bis(t-Butylimido) bis(DiMethylamido) Tungsten
CAS#: 406462-43-9
H2S, Hydrogen Sulfide
CAS#: 7783-06-4
Deposition Temperature = 350C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo Scientific K-Alpha

Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry
Diagnostic: -

Characteristic: Raman Spectra
Analysis: Raman Spectroscopy
Diagnostic: Renishaw Invia Raman

Characteristic: Photoluminescence
Analysis: PL, PhotoLuminescence
Diagnostic: Renishaw Invia Raman

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Diagnostic: JEOL JEM ARM 200

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: TEM, Transmission Electron Microscope
Diagnostic: JEOL JEM ARM 200

Substrates

SiO2

Notes

1679