Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Bis(t-butylimido)bis(dimethylamino)molybdenum, CAS# 923956-62-1

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 16 record(s).

NumberTitle
1Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure
2Plasma-enhanced atomic-layer-deposited MoOx emitters for silicon heterojunction solar cells
3Plasma enhanced atomic layer deposition of molybdenum carbide and nitride with bis(tert-butylimido)bis(dimethylamido) molybdenum
4Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
5Effect of substrate on the growth and properties of MoS2 thin films grown by plasma-enhanced atomic layer deposition
6Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS2 Monolayers
7Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
8Large area, patterned growth of 2D MoS2 and lateral MoS2-WS2 heterostructures for nano- and opto-electronic applications
9Atomic layer deposition of molybdenum oxide from (NtBu)2(NMe2)2Mo and O2 plasma
10Atomic Layer Deposition of Large-Area Polycrystalline Transition Metal Dichalcogenides from 100°C through Control of Plasma Chemistry
11Low-temperature atomic layer deposition of MoOx for silicon heterojunction solar cells
12Controlling transition metal atomic ordering in two-dimensional Mo1-xWxS2 alloys
13Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
14Controlling transition metal atomic ordering in two-dimensional Mo1-xWxS2 alloys
15Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
16Thickness and Morphology Dependent Electrical Properties of ALD-Synthesized MoS2 FETs