Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Bis(t-butylimido)bis(dimethylamino)molybdenum, CAS# 923956-62-1

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 16 record(s).

NumberTitle
1Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
2Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
3Atomic Layer Deposition of Large-Area Polycrystalline Transition Metal Dichalcogenides from 100°C through Control of Plasma Chemistry
4Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
5Plasma enhanced atomic layer deposition of molybdenum carbide and nitride with bis(tert-butylimido)bis(dimethylamido) molybdenum
6Atomic layer deposition of molybdenum oxide from (NtBu)2(NMe2)2Mo and O2 plasma
7Effect of substrate on the growth and properties of MoS2 thin films grown by plasma-enhanced atomic layer deposition
8Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure
9Controlling transition metal atomic ordering in two-dimensional Mo1-xWxS2 alloys
10Low-temperature atomic layer deposition of MoOx for silicon heterojunction solar cells
11Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
12Large area, patterned growth of 2D MoS2 and lateral MoS2-WS2 heterostructures for nano- and opto-electronic applications
13Controlling transition metal atomic ordering in two-dimensional Mo1-xWxS2 alloys
14Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS2 Monolayers
15Thickness and Morphology Dependent Electrical Properties of ALD-Synthesized MoS2 FETs
16Plasma-enhanced atomic-layer-deposited MoOx emitters for silicon heterojunction solar cells