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Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure

Type:
Journal
Info:
Journal of Vacuum Science & Technology A 39, 053408 (2021)
Date:
2021-07-27
DOI:
http://dx.doi.org/10.1116/6.0001175

Author Information

Name Institution
Md. Istiaque ChowdhuryLehigh University
Mark J. SowaVeeco Instruments
Kylie E. Van MeterFlorida State University
Tomas F. BabuskaFlorida State University
Tomas GrejtakFlorida State University
Alexander Campbell KozenUniversity of Maryland
Brandon A. KrickFlorida State University
Nicholas C. StrandwitzLehigh University

Films

Plasma TiMoN

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
TDMATi, tetrakis(dimethylamido)titanium, titanium dimethylamide, (Me2N)4Ti
CAS#: 3275-24-9
Bis(t-butylimido)bis(dimethylamino)molybdenum
CAS#: 923956-62-1
N2, Nitrogen
CAS#: 7727-37-9
H2, Hydrogen
CAS#: 1333-74-0
Deposition Temperature = 250C

Film/Plasma Properties

Characteristic: Refractive Index
Analysis: Ellipsometry
Diagnostic: Horiba Jobin Yvon UVISEL

Characteristic: Extinction Coefficient
Analysis: Ellipsometry
Diagnostic: Horiba Jobin Yvon UVISEL

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: PANalytical Empyrean

Characteristic: Stress
Analysis: XRD, X-Ray Diffraction
Diagnostic: PANalytical Empyrean

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Diagnostic: PANalytical Empyrean

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Diagnostic: PANalytical Empyrean

Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe
Diagnostic: Lucas Labs 302

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo Scientific K-Alpha

Characteristic: Wear Rate
Analysis: Reciprocating Sliding Test
Diagnostic: Custom

Characteristic: Friction Coefficient
Analysis: Reciprocating Sliding Test
Diagnostic: Custom

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: Bruker Dimension ICON

Substrates

Silicon
SiO2
Sapphire

Notes

1575