Mark J. Sowa Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mark J. Sowa returned 13 record(s).

Number	Title
1	RF Characterization of Novel Superconducting Materials and Multilayers
2	Plasma-enhanced atomic layer deposition of titanium vanadium nitride
3	Plasma-enhanced atomic layer deposition of tungsten nitride
4	Plasma-enhanced atomic layer deposition of vanadium nitride
5	Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
6	Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
7	Enhanced X-ray reflectivity from Pt-coated silicon micropore optics prepared by plasma atomic layer deposition
8	Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure
9	Plasma-enhanced atomic layer deposition of ruthenium metal on free-standing carbon nanotube forest for 3D flexible binder-less supercapacitor electrodes
10	Plasma-enhanced atomic layer deposition of superconducting niobium nitride
11	Performance of Samples with Novel SRF Materials and Growth Techniques
12	Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films
13	Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor