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Plasma-enhanced atomic layer deposition of titanium vanadium nitride

Type:
Journal
Info:
Journal of Vacuum Science & Technology A 36, 06A103 (2018)
Date:
2018-08-17
DOI:
http://dx.doi.org/10.1116/1.5037463

Author Information

Name Institution
Mark J. SowaCambridge NanoTech
Ling JuLehigh University
Alexander Campbell KozenU.S. Naval Research Laboratory
Nicholas C. StrandwitzLehigh University
Guosong ZengLehigh University
Tomas F. BabuskaLehigh University
Zakaria HsainUniversity of Pennsylvania
Brandon A. KrickLehigh University

Films

Plasma TiN

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
TDMATi, tetrakis(dimethylamido)titanium, titanium dimethylamide, (Me2N)4Ti
CAS#: 3275-24-9
N2, Nitrogen
CAS#: 7727-37-9
Deposition Temperature = 250C

Plasma VN

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
TDMAV, (Me2N)4V, [(CH3)2N]4V, Tetrakis(DiMethylAmido) Vanadium, Vanadium Dimethylamide
CAS#: 19824-56-7
N2, Nitrogen
CAS#: 7727-37-9
Deposition Temperature = 250C

Plasma TiVN

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
TDMATi, tetrakis(dimethylamido)titanium, titanium dimethylamide, (Me2N)4Ti
CAS#: 3275-24-9
TDMAV, (Me2N)4V, [(CH3)2N]4V, Tetrakis(DiMethylAmido) Vanadium, Vanadium Dimethylamide
CAS#: 19824-56-7
N2, Nitrogen
CAS#: 7727-37-9
Deposition Temperature = 250C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: -

Characteristic: Refractive Index
Analysis: Ellipsometry
Diagnostic: -

Characteristic: Extinction Coefficient
Analysis: Ellipsometry
Diagnostic: -

Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe
Diagnostic: Lucas Labs 302

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo Scientific K-Alpha

Characteristic: Wear Rate
Analysis: Pin on Disc
Diagnostic: Custom

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Diagnostic: PANalytical Empyrean

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Diagnostic: PANalytical Empyrean

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: PANalytical Empyrean

Substrates

Si with native oxide
SiO2

Notes

1188