Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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VN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing VN films returned 3 record(s).

NumberTitle
1Plasma-enhanced atomic layer deposition of titanium vanadium nitride
2Plasma-enhanced atomic layer deposition of vanadium nitride
3Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers