Ling Ju Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ling Ju returned 3 record(s).

Number	Title
1	Plasma-enhanced atomic layer deposition of vanadium nitride
2	Plasma-enhanced atomic layer deposition of titanium vanadium nitride
3	Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition