Tomas F. Babuska Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Tomas F. Babuska returned 5 record(s).

Number	Title
1	Plasma-enhanced atomic layer deposition of vanadium nitride
2	Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure
3	Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films
4	Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
5	Plasma-enhanced atomic layer deposition of titanium vanadium nitride