TiVN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing TiVN films returned 2 record(s).

Number	Title
1	Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films
2	Plasma-enhanced atomic layer deposition of titanium vanadium nitride