MoS₂ Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing MoS₂ films returned 5 record(s).

Number	Title
1	Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
2	Controlling transition metal atomic ordering in two-dimensional Mo1-xWxS2 alloys
3	Atomic Layer Deposition of Large-Area Polycrystalline Transition Metal Dichalcogenides from 100°C through Control of Plasma Chemistry
4	Effect of substrate on the growth and properties of MoS2 thin films grown by plasma-enhanced atomic layer deposition
5	Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology