WS₂ Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing WS₂ films returned 11 record(s).

Number	Title
1	Low-temperature direct synthesis of high quality WS₂ thin films by plasma-enhanced atomic layer deposition for energy related applications
2	Probing the Origin and Suppression of Vertically Oriented Nanostructures of 2D WS₂ Layers
3	Thickness-dependent electrochemical response of plasma enhanced atomic layer deposited WS₂ anodes in Na-ion battery
4	Controlling transition metal atomic ordering in two-dimensional Mo_1-xW_xS₂ alloys
5	Nucleation mechanism during WS₂ plasma enhanced atomic layer deposition on amorphous Al₂O₃ and sapphire substrates
6	Low temperature deposition of 2D WS₂ layers from WF₆ and H₂S precursors: impact of reducing agents
7	Edge-Site Nanoengineering of WS₂ by Low-Temperature Plasma-Enhanced Atomic Layer Deposition for Electrocatalytic Hydrogen Evolution
8	Atomic Layer Deposition of Large-Area Polycrystalline Transition Metal Dichalcogenides from 100°C through Control of Plasma Chemistry
9	Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS₂ from WF₆, H₂ Plasma, and H₂S
10	Area-Selective Atomic Layer Deposition of Two-Dimensional WS₂ Nanolayers
11	WS₂ transistors on 300 mm wafers with BEOL compatibility

WS2 Plasma Enhanced Atomic Layer Deposition Film Publications