Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition

Type:

Journal

Info:

J. Phys. Chem. C, 0, 0 (ja), pp null

Date:

2015-12-12

DOI:

http://dx.doi.org/10.1021/acs.jpcc.5b10839

Author Information

Name	Institution
Roger H.E.C. Bosch	Eindhoven University of Technology
Frank L. Bloksma	Philips
Jochem M.M. Huijs	Philips
Marcel A. Verheijen	Eindhoven University of Technology
Erwin (W.M.M.) Kessels	Eindhoven University of Technology

Hardware used: Custom

CAS#: 94442-22-5

CAS#: 7782-44-7

CAS#: 1333-74-0

Deposition Temperature = 25C

Characteristic: Surface Reactions

Analysis: FTIR, Fourier Transform InfraRed spectroscopy

Diagnostic: Bruker Optics Vector 22

Characteristic: Thickness

Analysis: Ellipsometry

Diagnostic: J.A. Woollam M-2000U

Characteristic: Images

Analysis: TEM, Transmission Electron Microscope

Diagnostic: JEOL JEM ARM 200

Si(100)

436