Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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(Trimethyl)methylcyclopentadienylplatinum, MeCpMe3Pt, CAS# 94442-22-5

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 35 record(s).

NumberTitle
1Structural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions
2Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
3Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops
4Structure of Ru/Pt Nanocomposite Films Fabricated by Plasma-Enhanced Atomic Layer Depositions
5Remote Plasma ALD of Platinum and Platinum Oxide Films
6The size effect of titania-supported Pt nanoparticles on the electrocatalytic activity towards methanol oxidation reaction primarily via the bifunctional mechanism
7Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
8Growth of AlN/Pt heterostructures on amorphous substrates at low temperatures via atomic layer epitaxy
9Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
10Encapsulation method for atom probe tomography analysis of nanoparticles
11Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing
12Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers
13Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
14Growth of silica nanowires in vacuum
15Room-Temperature Atomic Layer Deposition of Platinum
16Metallic nanoparticle-based strain sensors elaborated by atomic layer deposition
17Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition
18Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum
19Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
20Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition
21Enhanced X-ray reflectivity from Pt-coated silicon micropore optics prepared by plasma atomic layer deposition
22Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates
23Atomic Layer Deposition of Cobalt Phosphide for Efficient Water Splitting
24Enhanced Methanol Oxidation with Annealed Atomic Layer Deposited Platinum Nanoparticles on Carbon Nanotubes
25In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
26Remote Plasma ALD of Platinum and Platinum Oxide Films
27Atomic Layer Deposition of the Conductive Delafossite PtCoO2
28Synthesis of Pt@TiO2@CNTs Hierarchical Structure Catalyst by Atomic Layer Deposition and Their Photocatalytic and Photoelectrochemical Activity
29Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support
30Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation
31Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
32Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
33Plasma enhanced atomic layer deposited platinum thin film on Si substrate with TMA pretreatment
34Supportless Platinum Nanotubes Array by Atomic Layer Deposition as PEM Fuel Cell Electrode
35Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma