Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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(Trimethyl)methylcyclopentadienylplatinum, MeCpMe3Pt, CAS# 94442-22-5

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 35 record(s).

NumberTitle
1Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers
2Supportless Platinum Nanotubes Array by Atomic Layer Deposition as PEM Fuel Cell Electrode
3Synthesis of Pt@TiO2@CNTs Hierarchical Structure Catalyst by Atomic Layer Deposition and Their Photocatalytic and Photoelectrochemical Activity
4Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
5Atomic Layer Deposition of Cobalt Phosphide for Efficient Water Splitting
6The size effect of titania-supported Pt nanoparticles on the electrocatalytic activity towards methanol oxidation reaction primarily via the bifunctional mechanism
7In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
8Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
9Remote Plasma ALD of Platinum and Platinum Oxide Films
10Encapsulation method for atom probe tomography analysis of nanoparticles
11Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
12Enhanced Methanol Oxidation with Annealed Atomic Layer Deposited Platinum Nanoparticles on Carbon Nanotubes
13Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing
14Room-Temperature Atomic Layer Deposition of Platinum
15Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates
16Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops
17Plasma enhanced atomic layer deposited platinum thin film on Si substrate with TMA pretreatment
18Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation
19Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
20Atomic Layer Deposition of the Conductive Delafossite PtCoO2
21Enhanced X-ray reflectivity from Pt-coated silicon micropore optics prepared by plasma atomic layer deposition
22Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
23Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
24Metallic nanoparticle-based strain sensors elaborated by atomic layer deposition
25Growth of silica nanowires in vacuum
26Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition
27Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition
28Growth of AlN/Pt heterostructures on amorphous substrates at low temperatures via atomic layer epitaxy
29Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support
30Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma
31Structure of Ru/Pt Nanocomposite Films Fabricated by Plasma-Enhanced Atomic Layer Depositions
32Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum
33Structural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions
34Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
35Remote Plasma ALD of Platinum and Platinum Oxide Films