Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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(Trimethyl)methylcyclopentadienylplatinum, MeCpMe3Pt, CAS# 94442-22-5

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 35 record(s).

NumberTitle
1Encapsulation method for atom probe tomography analysis of nanoparticles
2Enhanced X-ray reflectivity from Pt-coated silicon micropore optics prepared by plasma atomic layer deposition
3Growth of silica nanowires in vacuum
4The size effect of titania-supported Pt nanoparticles on the electrocatalytic activity towards methanol oxidation reaction primarily via the bifunctional mechanism
5Room-Temperature Atomic Layer Deposition of Platinum
6Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
7Atomic Layer Deposition of Cobalt Phosphide for Efficient Water Splitting
8Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition
9Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum
10Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
11Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition
12In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
13Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates
14Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma
15Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
16Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support
17Atomic Layer Deposition of the Conductive Delafossite PtCoO2
18Plasma enhanced atomic layer deposited platinum thin film on Si substrate with TMA pretreatment
19Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
20Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation
21Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers
22Remote Plasma ALD of Platinum and Platinum Oxide Films
23Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
24Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops
25Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
26Supportless Platinum Nanotubes Array by Atomic Layer Deposition as PEM Fuel Cell Electrode
27Metallic nanoparticle-based strain sensors elaborated by atomic layer deposition
28Structural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions
29Remote Plasma ALD of Platinum and Platinum Oxide Films
30Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing
31Synthesis of Pt@TiO2@CNTs Hierarchical Structure Catalyst by Atomic Layer Deposition and Their Photocatalytic and Photoelectrochemical Activity
32Growth of AlN/Pt heterostructures on amorphous substrates at low temperatures via atomic layer epitaxy
33Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
34Enhanced Methanol Oxidation with Annealed Atomic Layer Deposited Platinum Nanoparticles on Carbon Nanotubes
35Structure of Ru/Pt Nanocomposite Films Fabricated by Plasma-Enhanced Atomic Layer Depositions