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The Plasma Enhanced Atomic Layer Deposition Publication Database is developed and maintained by Plasma ALD, LLC, a developer and supplier of inductively coupled plasma (ICP) sources for plasma-enhanced atomic layer deposition (PEALD), atomic layer etch (ALE), thin-film etching, surface cleaning, surface modification, and research plasma systems.

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(Trimethyl)methylcyclopentadienylplatinum, MeCpMe3Pt, CAS# 94442-22-5

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 35 record(s).

NumberTitle
1Supportless Platinum Nanotubes Array by Atomic Layer Deposition as PEM Fuel Cell Electrode
2The size effect of titania-supported Pt nanoparticles on the electrocatalytic activity towards methanol oxidation reaction primarily via the bifunctional mechanism
3In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
4Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing
5Atomic Layer Deposition of the Conductive Delafossite PtCoO2
6Enhanced Methanol Oxidation with Annealed Atomic Layer Deposited Platinum Nanoparticles on Carbon Nanotubes
7Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
8Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
9Structure of Ru/Pt Nanocomposite Films Fabricated by Plasma-Enhanced Atomic Layer Depositions
10Growth of silica nanowires in vacuum
11Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers
12Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates
13Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation
14Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
15Plasma enhanced atomic layer deposited platinum thin film on Si substrate with TMA pretreatment
16Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
17Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
18Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma
19Atomic Layer Deposition of Cobalt Phosphide for Efficient Water Splitting
20Remote Plasma ALD of Platinum and Platinum Oxide Films
21Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
22Remote Plasma ALD of Platinum and Platinum Oxide Films
23Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops
24Encapsulation method for atom probe tomography analysis of nanoparticles
25Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
26Structural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions
27Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum
28Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition
29Metallic nanoparticle-based strain sensors elaborated by atomic layer deposition
30Growth of AlN/Pt heterostructures on amorphous substrates at low temperatures via atomic layer epitaxy
31Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support
32Synthesis of Pt@TiO2@CNTs Hierarchical Structure Catalyst by Atomic Layer Deposition and Their Photocatalytic and Photoelectrochemical Activity
33Enhanced X-ray reflectivity from Pt-coated silicon micropore optics prepared by plasma atomic layer deposition
34Room-Temperature Atomic Layer Deposition of Platinum
35Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition