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Atomic Layer Deposition of Cobalt Phosphide for Efficient Water Splitting

Type:
Journal
Info:
Angew. Chem. Int. Ed. 2020, 59, 17172 - 17176
Date:
2020-06-30
DOI:
https://doi.org/10.1002/anie.202002280

Author Information

Name Institution
Haojie ZhangMartin Luther University
Dirk J. HagenMax Planck Institute of Microstructure Physics
Xiaopeng LiDonghua University
Andreas GraffFraunhofer Institute for Microstructure of Materials and Systems IMWS
Frank HeyrothMartin Luther University
Bodo FuhrmannMartin Luther University
Ilya KostanovskiyMax Planck Institute of Microstructure Physics
Stefan L. SchweizerMartin Luther University
Francesco CaddeoMartin Luther University
A. Wouter MaijenburgMartin Luther University
Stuart S. P. ParkinMax Planck Institute of Microstructure Physics
Ralf B. WehrspohnMartin Luther University

Films

Plasma CoP

Hardware used: Oxford Instruments FlexAL
Bis(N-t-butyl-N'-ethylpropanimidamidato) cobalt(II)
CAS#: 1011477-51-2
PH3, Phospine, Phosphane
CAS#: 7803-51-2
H2, Hydrogen
CAS#: 1333-74-0
Deposition Temperature Range = 120-300C

Plasma CoOx

Hardware used: Oxford Instruments FlexAL
Bis(N-t-butyl-N'-ethylpropanimidamidato) cobalt(II)
CAS#: 1011477-51-2
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 220C

Plasma Pt

Hardware used: Oxford Instruments FlexAL
(Trimethyl)methylcyclopentadienylplatinum, MeCpMe3Pt
CAS#: 94442-22-5
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 220C

Film/Plasma Properties

Characteristic: Thickness
Analysis: RBS, Rutherford Backscattering Spectrometry
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry
Diagnostic: -

Characteristic: Morphology, Roughness, Topography
Analysis: TEM, Transmission Electron Microscope
Diagnostic: FEI Titan G2

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Diagnostic: FEI Titan G2

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: FEI Titan G2

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: FEI Quanta 650 FEG

Characteristic: Compositional Depth Profiling
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo Scientific K-Alpha

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: Bruker Dimension ICON

Characteristic: Electrochemical Performance
Analysis: Linear Sweep Voltammetry
Diagnostic: Metrohm Autolab PGSTAT302

Characteristic: Electrochemical Performance
Analysis: EIS, Electrochemical Impedance Spectroscopy
Diagnostic: Metrohm Autolab PGSTAT302

Characteristic: Photoelectrochemical (PEC) Activity
Analysis: Photoelectrochemical (PEC) Activity
Diagnostic: Metrohm Autolab PGSTAT302

Substrates

Silicon
FTO, F:SnO2

Notes

Most processing details in the supplementary information.
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