Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Haojie Zhang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Haojie Zhang returned 2 record(s).

NumberTitle
1Atomic Layer Deposition of the Conductive Delafossite PtCoO2
2Atomic Layer Deposition of Cobalt Phosphide for Efficient Water Splitting