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Dirk J. Hagen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Dirk J. Hagen returned 3 record(s).

NumberTitle
1Atomic Layer Deposition of the Conductive Delafossite PtCoO2
2Atomic Layer Deposition of Cobalt Phosphide for Efficient Water Splitting
3Island Coalescence during Film Growth: An Underestimated Limitation of Cu ALD