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Pt Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Pt films returned 35 record(s).

NumberTitle
1In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
2Atomic Layer Deposition of Cobalt Phosphide for Efficient Water Splitting
3Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
4Structure of Ru/Pt Nanocomposite Films Fabricated by Plasma-Enhanced Atomic Layer Depositions
5Synthesis of Pt@TiO2@CNTs Hierarchical Structure Catalyst by Atomic Layer Deposition and Their Photocatalytic and Photoelectrochemical Activity
6Growth of silica nanowires in vacuum
7Remote Plasma ALD of Platinum and Platinum Oxide Films
8Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
9Platinum thin films with good thermal and chemical stability fabricated by inductively coupled plasma-enhanced atomic layer deposition at low temperatures
10Metallic nanoparticle-based strain sensors elaborated by atomic layer deposition
11Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support
12Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation
13Supportless Platinum Nanotubes Array by Atomic Layer Deposition as PEM Fuel Cell Electrode
14Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum
15Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
16Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
17Plasma enhanced atomic layer deposited platinum thin film on Si substrate with TMA pretreatment
18Enhanced X-ray reflectivity from Pt-coated silicon micropore optics prepared by plasma atomic layer deposition
19Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing
20Structural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions
21Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition
22Encapsulation method for atom probe tomography analysis of nanoparticles
23The size effect of titania-supported Pt nanoparticles on the electrocatalytic activity towards methanol oxidation reaction primarily via the bifunctional mechanism
24Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
25Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops
26Enhanced Methanol Oxidation with Annealed Atomic Layer Deposited Platinum Nanoparticles on Carbon Nanotubes
27Growth of AlN/Pt heterostructures on amorphous substrates at low temperatures via atomic layer epitaxy
28Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma
29Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation
30Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates
31Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
32Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition
33Room-Temperature Atomic Layer Deposition of Platinum
34Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers
35Energy transformation of plasmonic photocatalytic oxidation on 1D quantum well of platinum thin film