Pt Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Pt films returned 35 record(s).

Number	Title
1	Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition
2	Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
3	Encapsulation method for atom probe tomography analysis of nanoparticles
4	Structure of Ru/Pt Nanocomposite Films Fabricated by Plasma-Enhanced Atomic Layer Depositions
5	Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops
6	Supportless Platinum Nanotubes Array by Atomic Layer Deposition as PEM Fuel Cell Electrode
7	Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
8	Energy transformation of plasmonic photocatalytic oxidation on 1D quantum well of platinum thin film
9	Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma
10	Synthesis of Pt@TiO2@CNTs Hierarchical Structure Catalyst by Atomic Layer Deposition and Their Photocatalytic and Photoelectrochemical Activity
11	Enhanced X-ray reflectivity from Pt-coated silicon micropore optics prepared by plasma atomic layer deposition
12	Room-Temperature Atomic Layer Deposition of Platinum
13	Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
14	Growth of silica nanowires in vacuum
15	In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
16	Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing
17	Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
18	Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition
19	Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
20	Plasma enhanced atomic layer deposited platinum thin film on Si substrate with TMA pretreatment
21	Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum
22	Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers
23	Growth of AlN/Pt heterostructures on amorphous substrates at low temperatures via atomic layer epitaxy
24	Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation
25	Metallic nanoparticle-based strain sensors elaborated by atomic layer deposition
26	Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation
27	Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support
28	Structural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions
29	Enhanced Methanol Oxidation with Annealed Atomic Layer Deposited Platinum Nanoparticles on Carbon Nanotubes
30	Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
31	Platinum thin films with good thermal and chemical stability fabricated by inductively coupled plasma-enhanced atomic layer deposition at low temperatures
32	Atomic Layer Deposition of Cobalt Phosphide for Efficient Water Splitting
33	Remote Plasma ALD of Platinum and Platinum Oxide Films
34	The size effect of titania-supported Pt nanoparticles on the electrocatalytic activity towards methanol oxidation reaction primarily via the bifunctional mechanism
35	Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates