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Supportless Platinum Nanotubes Array by Atomic Layer Deposition as PEM Fuel Cell Electrode

Type:
Journal
Info:
Electrochimica Acta Volume 125, 2014, Pages 107 - 116
Date:
2014-01-10
DOI:
http://dx.doi.org/10.1016/j.electacta.2014.01.061

Author Information

Name Institution
S. GalbiatiCEA - Grenoble
A. MorinCEA - Grenoble
N. PaucCEA - Grenoble

Films

Plasma Pt

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
(Trimethyl)methylcyclopentadienylplatinum, MeCpMe3Pt
CAS#: 94442-22-5
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 250C

Thermal Al2O3

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
H2O, Water
CAS#: 7732-18-5
Deposition Temperature = 250C

Film/Plasma Properties

Substrates

AAO, Anodic Aluminum Oxide

Notes

374