Roger H.E.C. Bosch Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Roger H.E.C. Bosch returned 2 record(s).

Number	Title
1	Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition
2	Atomic Layer Deposition of Silicon Nitride from Bis(tertiary-butyl-amino)silane and N₂ Plasma Studied by in Situ Gas Phase and Surface Infrared Spectroscopy