Jochem M.M. Huijs Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jochem M.M. Huijs returned 2 record(s).

Number	Title
1	Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition
2	Surface reactions of aminosilane precursors during N₂ plasma-assisted atomic layer deposition of SiN_x