Jan P. Hofmann Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jan P. Hofmann returned 6 record(s).

Number	Title
1	Large area, patterned growth of 2D MoS₂ and lateral MoS₂-WS₂ heterostructures for nano- and opto-electronic applications
2	On the Contact Optimization of ALD-Based MoS₂ FETs: Correlation of Processing Conditions and Interface Chemistry with Device Electrical Performance
3	Thickness and Morphology Dependent Electrical Properties of ALD-Synthesized MoS₂ FETs
4	Low-Temperature Phase-Controlled Synthesis of Titanium Di- and Tri-sulfide by Atomic Layer Deposition
5	Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS₂: large area, thickness control and tuneable morphology
6	Edge-Site Nanoengineering of WS₂ by Low-Temperature Plasma-Enhanced Atomic Layer Deposition for Electrocatalytic Hydrogen Evolution