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Publication Information

Title: Encapsulation method for atom probe tomography analysis of nanoparticles

Type: Journal

Info: Ultramicroscopy, Available online 24 February 2015

Date: 2015-04-28

DOI: http://dx.doi.org/10.1021/acsami.5b00677

Author Information

Name

Institution

CAMECA Instruments Inc.

CAMECA Instruments Inc.

Eindhoven University of Technology

Eindhoven University of Technology

CAMECA Instruments Inc.

Eindhoven University of Technology

CAMECA Instruments Inc.

Eindhoven University of Technology

CAMECA Instruments Inc.

CAMECA Instruments Inc.

Films

Plasma Pt using Custom

Deposition Temperature = 300C

94442-22-5

7782-44-7

Deposition Temperature = 250C

75-24-1

557-20-0

7732-18-5

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Images

APT, Atom Probe Tomography

CAMECA Instruments LEAP 4000X HR

Images

TEM, Transmission Electron Microscope

JEOL JEM ARM 200

Substrates

Keywords

Notes

329


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