Encapsulation method for atom probe tomography analysis of nanoparticles
Type:
Journal
Info:
Ultramicroscopy, Available online 24 February 2015
Date:
2015-04-28
Author Information
| Name | Institution |
|---|---|
| D.J. Larson | CAMECA Instruments Inc. |
| A.D. Giddings | CAMECA Instruments Inc. |
| Y. Wu | Eindhoven University of Technology |
| Marcel A. Verheijen | Eindhoven University of Technology |
| T.J. Prosa | CAMECA Instruments Inc. |
| Fred Roozeboom | Eindhoven University of Technology |
| K.P. Rice | CAMECA Instruments Inc. |
| Erwin (W.M.M.) Kessels | Eindhoven University of Technology |
| B.P. Geiser | CAMECA Instruments Inc. |
| T.F. Kelly | CAMECA Instruments Inc. |
Films
Thermal Al:ZnO
Film/Plasma Properties
Characteristic: Images
Analysis: APT, Atom Probe Tomography
Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Substrates
Notes
| 329 |