Encapsulation method for atom probe tomography analysis of nanoparticles

Type:
Journal
Info:
Ultramicroscopy, Available online 24 February 2015
Date:
2015-04-28

Author Information

Name Institution
D.J. LarsonCAMECA Instruments Inc.
A.D. GiddingsCAMECA Instruments Inc.
Y. WuEindhoven University of Technology
Marcel A. VerheijenEindhoven University of Technology
T.J. ProsaCAMECA Instruments Inc.
Fred RoozeboomEindhoven University of Technology
K.P. RiceCAMECA Instruments Inc.
Erwin (W.M.M.) KesselsEindhoven University of Technology
B.P. GeiserCAMECA Instruments Inc.
T.F. KellyCAMECA Instruments Inc.

Films

Plasma Pt



Film/Plasma Properties

Characteristic: Images
Analysis: APT, Atom Probe Tomography

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope

Substrates

Notes

329