Name

Institution

D.J. Larson

CAMECA Instruments Inc.

A.D. Giddings

CAMECA Instruments Inc.

Y. Wu

Eindhoven University of Technology

Marcel A. Verheijen

Eindhoven University of Technology

T.J. Prosa

CAMECA Instruments Inc.

Fred Roozeboom

Eindhoven University of Technology

K.P. Rice

CAMECA Instruments Inc.

Erwin (W.M.M.) Kessels

Eindhoven University of Technology

B.P. Geiser

CAMECA Instruments Inc.

T.F. Kelly

CAMECA Instruments Inc.

Plasma Pt using Custom

Deposition Temperature = 300C

(Trimethyl)methylcyclopentadienylplatinum, MeCpMe₃Pt

94442-22-5

Oxygen, O₂

7782-44-7

Thermal Al:ZnO using Oxford Instruments OpAL

Deposition Temperature = 250C

TMA, Trimethyl Aluminum, Trimethylalane, Trimethylaluminium, Aluminium Trimethyl, Aluminum Trimethanide, Al(CH₃)₃, AlMe₃, Al₂(CH₃)₆, Al₂Me₆

75-24-1

Where to buy precursor

DEZ, DiEthyl Zinc, ZnEt₂, Zn(C₂H₅)₂

557-20-0

Where to buy precursor

Water, H₂O

7732-18-5

Characteristic

Analysis

Diagnostic

Images

APT, Atom Probe Tomography

CAMECA Instruments LEAP 4000X HR

Images

TEM, Transmission Electron Microscope

JEOL JEM ARM 200

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