Encapsulation method for atom probe tomography analysis of nanoparticles

Type:
Journal
Info:
Ultramicroscopy, Available online 24 February 2015
Date:
2015-04-28
DOI:
http://dx.doi.org/10.1021/acsami.5b00677

Author Information

Name Institution
D.J. LarsonCAMECA Instruments Inc.
A.D. GiddingsCAMECA Instruments Inc.
Y. WuEindhoven University of Technology
Marcel A. VerheijenEindhoven University of Technology
T.J. ProsaCAMECA Instruments Inc.
Fred RoozeboomEindhoven University of Technology
K.P. RiceCAMECA Instruments Inc.
Erwin (W.M.M.) KesselsEindhoven University of Technology
B.P. GeiserCAMECA Instruments Inc.
T.F. KellyCAMECA Instruments Inc.

Films

Plasma Pt

Hardware used: Custom
(Trimethyl)methylcyclopentadienylplatinum, MeCpMe3Pt
CAS#: 94442-22-5
Where to buy precursor
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 300C

Thermal Al:ZnO

Hardware used: Oxford Instruments OpAL
TMA, AlMe3, Trimethyl Aluminum
CAS#: 75-24-1
Where to buy precursor
DEZ, DiEthyl Zinc, ZnEt2, Zn(C2H5)2
CAS#: 557-20-0
Where to buy precursor
H2O, Water
CAS#: 7732-18-5
Deposition Temperature = 250C

Film/Plasma Properties

Characteristic: Images
Analysis: APT, Atom Probe Tomography
Diagnostic: CAMECA Instruments LEAP 4000X HR

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Diagnostic: JEOL JEM ARM 200

Substrates

Keywords

Notes

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