Publication Information

Title: Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition

Type: Journal

Info: J. Phys. Chem. C, 0, 0 (ja), pp null

Date: 2015-12-12

DOI: http://dx.doi.org/10.1021/acs.jpcc.5b10839

Author Information

Name

Institution

Eindhoven University of Technology

Philips

Philips

Eindhoven University of Technology

Eindhoven University of Technology

Films

Plasma Pt using Custom

Deposition Temperature = 25C

94442-22-5

7782-44-7

1333-74-0

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Surface Reactions

FTIR, Fourier Transform InfraRed spectroscopy

Bruker Optics Vector 22

Thickness

Ellipsometry

J.A. Woollam M-2000U

Images

TEM, Transmission Electron Microscope

JEOL JEM ARM 200

Substrates

Si(100)

Keywords

Reaction Mechanism

Notes

436



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