Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition
Type:
Journal
Info:
J. Phys. Chem. C, 0, 0 (ja), pp null
Date:
2015-12-12
Author Information
| Name | Institution |
|---|---|
| Roger H.E.C. Bosch | Eindhoven University of Technology |
| Frank L. Bloksma | Philips |
| Jochem M.M. Huijs | Philips |
| Marcel A. Verheijen | Eindhoven University of Technology |
| Erwin (W.M.M.) Kessels | Eindhoven University of Technology |
Films
Film/Plasma Properties
Characteristic: Surface Reactions
Analysis: FTIR, Fourier Transform InfraRed spectroscopy
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Substrates
| Si(100) |
Notes
| 436 |