Publication Information

Title:
Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition
Type:
Journal
Info:
J. Phys. Chem. C, 0, 0 (ja), pp null
Date:
2015-12-12

Author Information

Name Institution
Roger H.E.C. BoschEindhoven University of Technology
Frank L. BloksmaPhilips
Jochem M.M. HuijsPhilips
Marcel A. VerheijenEindhoven University of Technology
Erwin (W.M.M.) KesselsEindhoven University of Technology

Films

Plasma Pt


Film/Plasma Properties

Characteristic: Surface Reactions
Analysis: FTIR, Fourier Transform InfraRed spectroscopy

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope

Substrates

Si(100)

Keywords

Reaction Mechanism

Notes

436