Frank L. Bloksma Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Frank L. Bloksma returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition