Jochem M.M. Huijs Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Jochem M.M. Huijs returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition|
|2||Surface reactions of aminosilane precursors during N2 plasma-assisted atomic layer deposition of SiNx|