Title: Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
Type: Journal
Info: The Journal of Chemical Physics 146, 052818 (2017)
Date: 2016-11-29
DOI: http://dx.doi.org/10.1063/1.4972120
Name
Institution
Eindhoven University of Technology
Eindhoven University of Technology
Eindhoven University of Technology
Eindhoven University of Technology
Eindhoven University of Technology
Eindhoven University of Technology
Characteristic
Analysis
Diagnostic
Thickness
Ellipsometry
J.A. Woollam M-2000U
Conformality, Step Coverage
SEM, Scanning Electron Microscopy
JEOL 7500F
Conformality, Step Coverage
TEM, Transmission Electron Microscope
FEI Tecnai F30ST
SiO2
897
I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com
© 2014-2018 plasma-ald.com