1 | In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition |
2 | Interfacial Self-Cleaning during PEALD HfO2 Process on GaAs Using TDMAH/O2 with Different (NH4)2S Cleaning Time |
3 | Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy |
4 | The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides |
5 | Infrared study on room-temperature atomic layer deposition of HfO2 using tetrakis(ethylmethylamino)hafnium and remote plasma-excited oxidizing agents |
6 | Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation |
7 | Plasma Processing for Crystallization and Densification of Atomic Layer Deposition BaTiO3 Thin Films |
8 | Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films |
9 | Influence of Surface Temperature on the Mechanism of Atomic Layer Deposition of Aluminum Oxide Using an Oxygen Plasma and Ozone |
10 | Plasma-enhanced atomic layer deposition of palladium on a polymer substrate |
11 | TaCN growth with PDMAT and H2/Ar plasma by plasma enhanced atomic layer deposition |
12 | Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma |
13 | Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries |
14 | Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition |
15 | Electrical Properties of Atomic Layer Deposition HfO2 and HfOxNy on Si Substrates with Various Crystal Orientations |
16 | Texture of atomic layer deposited ruthenium |
17 | Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature |
18 | Robust TaNx diffusion barrier for Cu-interconnect technology with subnanometer thickness by metal-organic plasma-enhanced atomic layer deposition |
19 | Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors |
20 | Atomic layer deposition of thin films as model electrodes: A case study of the synergistic effect in Fe2O3-SnO2 |
21 | Atomic Layer Deposition of Cobalt Using H2-, N2-, and NH3-Based Plasmas: On the Role of the Co-reactant |
22 | The physical properties of cubic plasma-enhanced atomic layer deposition TaN films |
23 | Plasma enhanced atomic layer deposition of gallium sulfide thin films |
24 | The effects of plasma treatment on the thermal stability of HfO2 thin films |
25 | Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films |
26 | Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers |
27 | Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma |
28 | The properties of Ru films deposited by remote plasma atomic layer deposition on Ar plasma-treated SiO2 |
29 | Plasma-enhanced atomic layer deposition of tantalum thin films: the growth and film properties |
30 | Direct Plating of Cu on Pd Plasma Enhanced Atomic Layer Deposition Coated TaN Barrier |
31 | Plasma-enhanced atomic layer deposition: Correlating O2 plasma parameters and species to blister formation and conformal film growth |
32 | Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry |
33 | Fundamental beam studies of radical enhanced atomic layer deposition of TiN |
34 | Characterization of plasma-enhanced atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide |
35 | Remote Plasma Atomic Layer Deposition of SiNx Using Cyclosilazane and H2/N2 Plasma |
36 | Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality |
37 | Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4 |
38 | Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition |
39 | Growth of cubic-TaN thin films by plasma-enhanced atomic layer deposition |
40 | Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition |
41 | Plasma-enhanced atomic layer deposition of zinc phosphate |
42 | Tuning size and coverage of Pd nanoparticles using atomic layer deposition |
43 | Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering |
44 | Characterization of Molybdenum Oxide Thin Films Grown by Atomic Layer Deposition |
45 | The Effects of Radio Frequency Plasma Power on Al2O3 Films Deposited at Room-Temperature by Remote Plasma Atomic Layer Deposition |
46 | Synthesis of single-walled carbon nanotubes from atomic-layer-deposited Co3O4 and Co3O4/Fe2O3 catalyst films |
47 | Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition |
48 | Reaction Mechanisms during Atomic Layer Deposition of AlF3 Using Al(CH3)3 and SF6 Plasma |
49 | Plasma enhanced atomic layer deposition of zinc sulfide thin films |
50 | Atomic Layer Deposition of Ruthenium and Ruthenium-oxide Thin Films by Using a Ru(EtCp)2 Precursor and Oxygen Gas |
51 | Plasma-assisted atomic layer deposition of nickel oxide as hole transport layer for hybrid perovskite solar cells |
52 | Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films |
53 | Synthesis and in situ characterization of low-resistivity TaNx films by remote plasma atomic layer deposition |
54 | Experimental and theoretical determination of the role of ions in atomic layer annealing |
55 | Atomic layer deposition of cobalt phosphate thin films for the oxygen evolution reaction |
56 | The effects of nitrogen profile and concentration on negative bias temperature instability of plasma enhanced atomic layer deposition HfOxNy prepared by in situ nitridation |
57 | Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications |
58 | Temperature dependence of silicon nitride deposited by remote plasma atomic layer deposition |
59 | Surface band bending and band alignment of plasma enhanced atomic layer deposited dielectrics on Ga- and N-face gallium nitride |
60 | Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas |
61 | Reaction mechanisms during plasma-assisted atomic layer deposition of metal oxides: A case study for Al2O3 |
62 | Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides |
63 | Growth of controllable ZnO film by atomic layer deposition technique via inductively coupled plasma treatment |
64 | Charge trapping characteristics of Au nanocrystals embedded in remote plasma atomic layer-deposited Al2O3 film as the tunnel and blocking oxides for nonvolatile memory applications |
65 | Uniform GaN thin films grown on (100) silicon by remote plasma atomic layer deposition |
66 | Characteristics of Nickel Thin Film and Formation of Nickel Silicide by Remote Plasma Atomic Layer Deposition using Ni(iPr-DAD)2 |
67 | Effect of Process Parameters on Remote PEALD for Highly Transparent ZnO Film Growth |
68 | In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd |
69 | Plasma-enhanced ALD system for SRF cavity |
70 | Self-formation of dielectric layer containing CoSi2 nanocrystals by plasma-enhanced atomic layer deposition |
71 | Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film |
72 | Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition |
73 | Inductively Coupled Hydrogen Plasma-Assisted Cu ALD on Metallic and Dielectric Surfaces |
74 | Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy |
75 | Uniformity of HfO2 Thin Films Prepared on Trench Structures via Plasma-Enhanced Atomic Layer Deposition |
76 | Comparison of thermal, plasma-enhanced and layer by layer Ar plasma treatment atomic layer deposition of Tin oxide thin films |
77 | On the determination of χ(2) in thin films: a comparison of one-beam second-harmonic generation measurement methodologies |
78 | Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2 |
79 | Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries |
80 | Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N2 or NH3 plasma |
81 | Surface chemistry of plasma-assisted atomic layer deposition of Al2O3 studied by infrared spectroscopy |
82 | The role of plasma in plasma-enhanced atomic layer deposition of crystalline films |
83 | Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition |
84 | Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films |
85 | Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition |
86 | The Growth of Tantalum Thin Films by Plasma-Enhanced Atomic Layer Deposition and Diffusion Barrier Properties |
87 | Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy |
88 | Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition |
89 | Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition |
90 | Remote Plasma Atomic Layer Deposition of Thin Films of Electrochemically Active LiCoO2 |
91 | Atomic layer deposition of Ta-based thin films: Reactions of alkylamide precursor with various reactants |
92 | Atomic Layer Deposition of Silicon Nitride from Bis(tertiary-butyl-amino)silane and N2 Plasma Studied by in Situ Gas Phase and Surface Infrared Spectroscopy |
93 | Room-temperature plasma enhanced atomic layer deposition of aluminum silicate and its application in dye-sensitized solar cells |
94 | Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches |
95 | Diffusion barrier properties of transition metal thin films grown by plasma-enhanced atomic-layer deposition |
96 | Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties |
97 | Fabrication and properties of AlN film on GaN substrate by using remote plasma atomic layer deposition method |
98 | Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate |
99 | High temperature phase transformation of tantalum nitride films deposited by plasma enhanced atomic layer deposition for gate electrode applications |
100 | Surface Reaction Mechanisms during Ozone and Oxygen Plasma Assisted Atomic Layer Deposition of Aluminum Oxide |
101 | Plasma-Assisted Atomic Layer Deposition of Palladium |
102 | Si atomic layer epitaxy based on Si2H6 and remote He plasma bombardment |
103 | Understanding the effect of nitrogen plasma exposure on plasma assisted atomic layer epitaxy of InN monitored by real time grazing incidence small angle x-ray scattering |
104 | High-Voltage and Low-Leakage-Current Gate Recessed Normally-Off GaN MIS-HEMTs With Dual Gate Insulator Employing PEALD-SiNx/RF-Sputtered-HfO2 |
105 | Room-Temperature Atomic Layer Deposition of Platinum |
106 | Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene |
107 | Improvement of Vth Instability in Normally-Off GaN MIS-HEMTs Employing PEALD-SiNx as an Interfacial Layer |
108 | The effect of plasma power on the properties of low-temperature silicon nitride deposited by RPALD for a gate spacer |
109 | Comparative Studies of Atomic Layer Deposition and Plasma-Enhanced Atomic Layer Deposition Ta2O5 and the Effects on Electrical Properties of In situ Nitridation |
110 | Plasma enhanced atomic layer deposition of aluminum sulfide thin films |
111 | Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide |
112 | Low temperature depositions of GaN thin films by plasma-enhanced atomic layer deposition |
113 | Study on SiN and SiCN film production using PE-ALD process with high-density multi-ICP source at low temperature |
114 | Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al2O3 |
115 | Thermal Stability of ALD HfO2 Thin Films and Interfacial Layers on the Oxynitride Underlayer Formed Using Remote Plasma |
116 | Enhanced interfacial reaction of precursor and low temperature substrate in HfO2 atomic layer deposition with highly Ar diluted O2 plasma |
117 | A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films |
118 | Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions |
119 | Comparison of AlF3 thin films grown by thermal and plasma enhanced atomic layer deposition |
120 | Surface reactions of aminosilane precursors during N2 plasma-assisted atomic layer deposition of SiNx |
121 | Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation |
122 | Characteristics of Thin Hf-Silicate Gate Dielectrics after Remote N2 and N2O Plasma Post-Treatments |
123 | Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor |
124 | Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material |
125 | Thermal and Plasma-Enhanced ALD of Ta and Ti Oxide Thin Films from Alkylamide Precursors |
126 | Nanometer-Thick Conformal Pore Sealing of Self-Assembled Mesoporous Silica by Plasma-Assisted Atomic Layer Deposition |
127 | In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3 |