Custom Remote Inductively Coupled Plasma Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Custom Remote Inductively Coupled Plasma hardware returned 111 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films
2Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films
3Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation
4Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
5Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma
6Atomic layer deposition of cobalt phosphate thin films for the oxygen evolution reaction
7Atomic Layer Deposition of Cobalt Using H2-, N2-, and NH3-Based Plasmas: On the Role of the Co-reactant
8Atomic Layer Deposition of Ruthenium and Ruthenium-oxide Thin Films by Using a Ru(EtCp)2 Precursor and Oxygen Gas
9Atomic Layer Deposition of Silicon Nitride from Bis(tertiary-butyl-amino)silane and N2 Plasma Studied by in Situ Gas Phase and Surface Infrared Spectroscopy
10Atomic layer deposition of Ta-based thin films: Reactions of alkylamide precursor with various reactants
11Atomic layer deposition of thin films as model electrodes: A case study of the synergistic effect in Fe2O3-SnO2
12Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
13Characteristics of Nickel Thin Film and Formation of Nickel Silicide by Remote Plasma Atomic Layer Deposition using Ni(iPr-DAD)2
14Characteristics of Thin Hf-Silicate Gate Dielectrics after Remote N2 and N2O Plasma Post-Treatments
15Characterization of plasma-enhanced atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide
16Charge trapping characteristics of Au nanocrystals embedded in remote plasma atomic layer-deposited Al2O3 film as the tunnel and blocking oxides for nonvolatile memory applications
17Comparative Studies of Atomic Layer Deposition and Plasma-Enhanced Atomic Layer Deposition Ta2O5 and the Effects on Electrical Properties of In situ Nitridation
18Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
19Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition
20Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
21Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition
22Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N2 or NH3 plasma
23Diffusion barrier properties of transition metal thin films grown by plasma-enhanced atomic-layer deposition
24Direct Plating of Cu on Pd Plasma Enhanced Atomic Layer Deposition Coated TaN Barrier
25Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film
26Effect of Process Parameters on Remote PEALD for Highly Transparent ZnO Film Growth
27Electrical Properties of Atomic Layer Deposition HfO2 and HfOxNy on Si Substrates with Various Crystal Orientations
28Fabrication and properties of AlN film on GaN substrate by using remote plasma atomic layer deposition method
29Fundamental beam studies of radical enhanced atomic layer deposition of TiN
30Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
31Growth of controllable ZnO film by atomic layer deposition technique via inductively coupled plasma treatment
32Growth of cubic-TaN thin films by plasma-enhanced atomic layer deposition
33High temperature phase transformation of tantalum nitride films deposited by plasma enhanced atomic layer deposition for gate electrode applications
34High-Voltage and Low-Leakage-Current Gate Recessed Normally-Off GaN MIS-HEMTs With Dual Gate Insulator Employing PEALD-SiNx/RF-Sputtered-HfO2
35Improvement of Vth Instability in Normally-Off GaN MIS-HEMTs Employing PEALD-SiNx as an Interfacial Layer
36In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
37In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
38In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition
39Inductively Coupled Hydrogen Plasma-Assisted Cu ALD on Metallic and Dielectric Surfaces
40Influence of Surface Temperature on the Mechanism of Atomic Layer Deposition of Aluminum Oxide Using an Oxygen Plasma and Ozone
41Infrared study on room-temperature atomic layer deposition of HfO2 using tetrakis(ethylmethylamino)hafnium and remote plasma-excited oxidizing agents
42Interfacial Self-Cleaning during PEALD HfO2 Process on GaAs Using TDMAH/O2 with Different (NH4)2S Cleaning Time
43Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
44Low temperature depositions of GaN thin films by plasma-enhanced atomic layer deposition
45Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties
46Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
47Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
48Nanometer-Thick Conformal Pore Sealing of Self-Assembled Mesoporous Silica by Plasma-Assisted Atomic Layer Deposition
49On the determination of χ(2) in thin films: a comparison of one-beam second-harmonic generation measurement methodologies
50Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition
51Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
52Plasma enhanced atomic layer deposition of aluminum sulfide thin films
53Plasma enhanced atomic layer deposition of gallium sulfide thin films
54Plasma enhanced atomic layer deposition of zinc sulfide thin films
55Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
56Plasma Processing for Crystallization and Densification of Atomic Layer Deposition BaTiO3 Thin Films
57Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers
58Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
59Plasma-Assisted Atomic Layer Deposition of Palladium
60Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
61Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
62Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
63Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering
64Plasma-enhanced ALD system for SRF cavity
65Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
66Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
67Plasma-enhanced atomic layer deposition of palladium on a polymer substrate
68Plasma-enhanced atomic layer deposition of tantalum thin films: the growth and film properties
69Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
70Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
71Plasma-enhanced atomic layer deposition of zinc phosphate
72Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
73Reaction mechanisms during plasma-assisted atomic layer deposition of metal oxides: A case study for Al2O3
74Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
75Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors
76Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
77Remote Plasma Atomic Layer Deposition of SiNx Using Cyclosilazane and H2/N2 Plasma
78Remote Plasma Atomic Layer Deposition of Thin Films of Electrochemically Active LiCoO2
79Robust TaNx diffusion barrier for Cu-interconnect technology with subnanometer thickness by metal-organic plasma-enhanced atomic layer deposition
80Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
81Room-Temperature Atomic Layer Deposition of Platinum
82Room-temperature plasma enhanced atomic layer deposition of aluminum silicate and its application in dye-sensitized solar cells
83Si atomic layer epitaxy based on Si2H6 and remote He plasma bombardment
84Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy
85Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
86Surface band bending and band alignment of plasma enhanced atomic layer deposited dielectrics on Ga- and N-face gallium nitride
87Surface chemistry of plasma-assisted atomic layer deposition of Al2O3 studied by infrared spectroscopy
88Surface Reaction Mechanisms during Ozone and Oxygen Plasma Assisted Atomic Layer Deposition of Aluminum Oxide
89Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide
90Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
91Surface reactions of aminosilane precursors during N2 plasma-assisted atomic layer deposition of SiNx
92Synthesis and in situ characterization of low-resistivity TaNx films by remote plasma atomic layer deposition
93Synthesis of single-walled carbon nanotubes from atomic-layer-deposited Co3O4 and Co3O4/Fe2O3 catalyst films
94TaCN growth with PDMAT and H2/Ar plasma by plasma enhanced atomic layer deposition
95Temperature dependence of silicon nitride deposited by remote plasma atomic layer deposition
96The effect of plasma power on the properties of low-temperature silicon nitride deposited by RPALD for a gate spacer
97The effects of nitrogen profile and concentration on negative bias temperature instability of plasma enhanced atomic layer deposition HfOxNy prepared by in situ nitridation
98The effects of plasma treatment on the thermal stability of HfO2 thin films
99The Effects of Radio Frequency Plasma Power on Al2O3 Films Deposited at Room-Temperature by Remote Plasma Atomic Layer Deposition
100The Growth of Tantalum Thin Films by Plasma-Enhanced Atomic Layer Deposition and Diffusion Barrier Properties
101The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
102The physical properties of cubic plasma-enhanced atomic layer deposition TaN films
103The properties of Ru films deposited by remote plasma atomic layer deposition on Ar plasma-treated SiO2
104The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
105Thermal and Plasma-Enhanced ALD of Ta and Ti Oxide Thin Films from Alkylamide Precursors
106Thermal Stability of ALD HfO2 Thin Films and Interfacial Layers on the Oxynitride Underlayer Formed Using Remote Plasma
107Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
108Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al2O3
109Understanding the effect of nitrogen plasma exposure on plasma assisted atomic layer epitaxy of InN monitored by real time grazing incidence small angle x-ray scattering
110Uniform GaN thin films grown on (100) silicon by remote plasma atomic layer deposition
111Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions