Custom ICP Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Custom ICP hardware returned 68 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation
2Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
3Atomic Layer Deposition of Silicon Nitride from Bis(tertiary-butyl-amino)silane and N2 Plasma Studied by in Situ Gas Phase and Surface Infrared Spectroscopy
4Atomic layer deposition of Ta-based thin films: Reactions of alkylamide precursor with various reactants
5Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
6Characteristics of Nickel Thin Film and Formation of Nickel Silicide by Remote Plasma Atomic Layer Deposition using Ni(iPr-DAD)2
7Characterization of plasma-enhanced atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide
8Charge trapping characteristics of Au nanocrystals embedded in remote plasma atomic layer-deposited Al2O3 film as the tunnel and blocking oxides for nonvolatile memory applications
9Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
10Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
11Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition
12Diffusion barrier properties of transition metal thin films grown by plasma-enhanced atomic-layer deposition
13Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film
14Fabrication and properties of AlN film on GaN substrate by using remote plasma atomic layer deposition method
15Fundamental beam studies of radical enhanced atomic layer deposition of TiN
16Growth of cubic-TaN thin films by plasma-enhanced atomic layer deposition
17In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
18In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition
19Inductively Coupled Hydrogen Plasma-Assisted Cu ALD on Metallic and Dielectric Surfaces
20Infrared study on room-temperature atomic layer deposition of HfO2 using tetrakis(ethylmethylamino)hafnium and remote plasma-excited oxidizing agents
21Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
22Low temperature depositions of GaN thin films by plasma-enhanced atomic layer deposition
23Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties
24Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
25On the determination of χ(2) in thin films: a comparison of one-beam second-harmonic generation measurement methodologies
26Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition
27Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
28Plasma enhanced atomic layer deposition of aluminum sulfide thin films
29Plasma enhanced atomic layer deposition of gallium sulfide thin films
30Plasma enhanced atomic layer deposition of zinc sulfide thin films
31Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
32Plasma Processing for Crystallization and Densification of Atomic Layer Deposition BaTiO3 Thin Films
33Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
34Plasma-Assisted Atomic Layer Deposition of Palladium
35Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
36Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
37Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering
38Plasma-enhanced ALD system for SRF cavity
39Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
40Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
41Plasma-enhanced atomic layer deposition of palladium on a polymer substrate
42Plasma-enhanced atomic layer deposition of tantalum thin films: the growth and film properties
43Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
44Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
45Plasma-enhanced atomic layer deposition of zinc phosphate
46Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
47Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
48Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors
49Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
50Robust TaNx diffusion barrier for Cu-interconnect technology with subnanometer thickness by metal-organic plasma-enhanced atomic layer deposition
51Room-Temperature Atomic Layer Deposition of Platinum
52Room-temperature plasma enhanced atomic layer deposition of aluminum silicate and its application in dye-sensitized solar cells
53Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
54Surface band bending and band alignment of plasma enhanced atomic layer deposited dielectrics on Ga- and N-face gallium nitride
55Surface Reaction Mechanisms during Ozone and Oxygen Plasma Assisted Atomic Layer Deposition of Aluminum Oxide
56Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide
57Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
58Synthesis of single-walled carbon nanotubes from atomic-layer-deposited Co3O4 and Co3O4/Fe2O3 catalyst films
59Temperature dependence of silicon nitride deposited by remote plasma atomic layer deposition
60The effect of plasma power on the properties of low-temperature silicon nitride deposited by RPALD for a gate spacer
61The Effects of Radio Frequency Plasma Power on Al2O3 Films Deposited at Room-Temperature by Remote Plasma Atomic Layer Deposition
62The Growth of Tantalum Thin Films by Plasma-Enhanced Atomic Layer Deposition and Diffusion Barrier Properties
63The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
64The physical properties of cubic plasma-enhanced atomic layer deposition TaN films
65The properties of Ru films deposited by remote plasma atomic layer deposition on Ar plasma-treated SiO2
66Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
67Uniform GaN thin films grown on (100) silicon by remote plasma atomic layer deposition
68Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions


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