Custom ICP Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Custom ICP hardware returned 57 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

1Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation
2Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
3Atomic Layer Deposition of Silicon Nitride from Bis(tertiary-butyl-amino)silane and N2 Plasma Studied by in Situ Gas Phase and Surface Infrared Spectroscopy
4Atomic layer deposition of Ta-based thin films: Reactions of alkylamide precursor with various reactants
5Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
6Characteristics of Nickel Thin Film and Formation of Nickel Silicide by Remote Plasma Atomic Layer Deposition using Ni(iPr-DAD)2
7Characterization of plasma-enhanced atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide
8Charge trapping characteristics of Au nanocrystals embedded in remote plasma atomic layer-deposited Al2O3 film as the tunnel and blocking oxides for nonvolatile memory applications
9Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
10Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
11Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition
12Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film
13Fabrication and properties of AlN film on GaN substrate by using remote plasma atomic layer deposition method
14In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
15Inductively Coupled Hydrogen Plasma-Assisted Cu ALD on Metallic and Dielectric Surfaces
16Infrared study on room-temperature atomic layer deposition of HfO2 using tetrakis(ethylmethylamino)hafnium and remote plasma-excited oxidizing agents
17Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
18Low temperature depositions of GaN thin films by plasma-enhanced atomic layer deposition
19Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties
20Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
21On the determination of χ(2) in thin films: a comparison of one-beam second-harmonic generation measurement methodologies
22Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition
23Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
24Plasma enhanced atomic layer deposition of aluminum sulfide thin films
25Plasma enhanced atomic layer deposition of zinc sulfide thin films
26Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
27Plasma Processing for Crystallization and Densification of Atomic Layer Deposition BaTiO3 Thin Films
28Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
29Plasma-Assisted Atomic Layer Deposition of Palladium
30Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering
31Plasma-enhanced ALD system for SRF cavity
32Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
33Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
34Plasma-enhanced atomic layer deposition of palladium on a polymer substrate
35Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
36Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
37Plasma-enhanced atomic layer deposition of zinc phosphate
38Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
39Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
40Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors
41Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
42Room-Temperature Atomic Layer Deposition of Platinum
43Room-temperature plasma enhanced atomic layer deposition of aluminum silicate and its application in dye-sensitized solar cells
44Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
45Surface band bending and band alignment of plasma enhanced atomic layer deposited dielectrics on Ga- and N-face gallium nitride
46Surface Reaction Mechanisms during Ozone and Oxygen Plasma Assisted Atomic Layer Deposition of Aluminum Oxide
47Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide
48Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
49Synthesis of single-walled carbon nanotubes from atomic-layer-deposited Co3O4 and Co3O4/Fe2O3 catalyst films
50Temperature dependence of silicon nitride deposited by remote plasma atomic layer deposition
51The effect of plasma power on the properties of low-temperature silicon nitride deposited by RPALD for a gate spacer
52The Effects of Radio Frequency Plasma Power on Al2O3 Films Deposited at Room-Temperature by Remote Plasma Atomic Layer Deposition
53The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
54The properties of Ru films deposited by remote plasma atomic layer deposition on Ar plasma-treated SiO2
55Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
56Uniform GaN thin films grown on (100) silicon by remote plasma atomic layer deposition
57Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions


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