Custom ICP Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Custom ICP hardware returned 72 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation
2	Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
3	Atomic Layer Deposition of Silicon Nitride from Bis(tertiary-butyl-amino)silane and N2 Plasma Studied by in Situ Gas Phase and Surface Infrared Spectroscopy
4	Atomic layer deposition of Ta-based thin films: Reactions of alkylamide precursor with various reactants
5	Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
6	Characteristics of Nickel Thin Film and Formation of Nickel Silicide by Remote Plasma Atomic Layer Deposition using Ni(iPr-DAD)2
7	Characterization of plasma-enhanced atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide
8	Charge trapping characteristics of Au nanocrystals embedded in remote plasma atomic layer-deposited Al2O3 film as the tunnel and blocking oxides for nonvolatile memory applications
9	Comparative Studies of Atomic Layer Deposition and Plasma-Enhanced Atomic Layer Deposition Ta2O5 and the Effects on Electrical Properties of In situ Nitridation
10	Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
11	Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
12	Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition
13	Diffusion barrier properties of transition metal thin films grown by plasma-enhanced atomic-layer deposition
14	Direct Plating of Cu on Pd Plasma Enhanced Atomic Layer Deposition Coated TaN Barrier
15	Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film
16	Fabrication and properties of AlN film on GaN substrate by using remote plasma atomic layer deposition method
17	Fundamental beam studies of radical enhanced atomic layer deposition of TiN
18	Growth of cubic-TaN thin films by plasma-enhanced atomic layer deposition
19	In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
20	In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition
21	Inductively Coupled Hydrogen Plasma-Assisted Cu ALD on Metallic and Dielectric Surfaces
22	Infrared study on room-temperature atomic layer deposition of HfO2 using tetrakis(ethylmethylamino)hafnium and remote plasma-excited oxidizing agents
23	Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
24	Low temperature depositions of GaN thin films by plasma-enhanced atomic layer deposition
25	Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties
26	Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
27	Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
28	On the determination of χ(2) in thin films: a comparison of one-beam second-harmonic generation measurement methodologies
29	Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition
30	Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
31	Plasma enhanced atomic layer deposition of aluminum sulfide thin films
32	Plasma enhanced atomic layer deposition of gallium sulfide thin films
33	Plasma enhanced atomic layer deposition of zinc sulfide thin films
34	Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
35	Plasma Processing for Crystallization and Densification of Atomic Layer Deposition BaTiO3 Thin Films
36	Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
37	Plasma-Assisted Atomic Layer Deposition of Palladium
38	Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
39	Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
40	Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering
41	Plasma-enhanced ALD system for SRF cavity
42	Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
43	Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
44	Plasma-enhanced atomic layer deposition of palladium on a polymer substrate
45	Plasma-enhanced atomic layer deposition of tantalum thin films: the growth and film properties
46	Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
47	Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
48	Plasma-enhanced atomic layer deposition of zinc phosphate
49	Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
50	Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
51	Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors
52	Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
53	Robust TaNx diffusion barrier for Cu-interconnect technology with subnanometer thickness by metal-organic plasma-enhanced atomic layer deposition
54	Room-Temperature Atomic Layer Deposition of Platinum
55	Room-temperature plasma enhanced atomic layer deposition of aluminum silicate and its application in dye-sensitized solar cells
56	Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
57	Surface band bending and band alignment of plasma enhanced atomic layer deposited dielectrics on Ga- and N-face gallium nitride
58	Surface Reaction Mechanisms during Ozone and Oxygen Plasma Assisted Atomic Layer Deposition of Aluminum Oxide
59	Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide
60	Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
61	Synthesis of single-walled carbon nanotubes from atomic-layer-deposited Co3O4 and Co3O4/Fe2O3 catalyst films
62	Temperature dependence of silicon nitride deposited by remote plasma atomic layer deposition
63	The effect of plasma power on the properties of low-temperature silicon nitride deposited by RPALD for a gate spacer
64	The Effects of Radio Frequency Plasma Power on Al2O3 Films Deposited at Room-Temperature by Remote Plasma Atomic Layer Deposition
65	The Growth of Tantalum Thin Films by Plasma-Enhanced Atomic Layer Deposition and Diffusion Barrier Properties
66	The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
67	The physical properties of cubic plasma-enhanced atomic layer deposition TaN films
68	The properties of Ru films deposited by remote plasma atomic layer deposition on Ar plasma-treated SiO2
69	Thermal Stability of ALD HfO2 Thin Films and Interfacial Layers on the Oxynitride Underlayer Formed Using Remote Plasma
70	Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
71	Uniform GaN thin films grown on (100) silicon by remote plasma atomic layer deposition
72	Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions

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