Custom ICP Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Custom ICP hardware returned 72 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation
2Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
3Atomic Layer Deposition of Silicon Nitride from Bis(tertiary-butyl-amino)silane and N2 Plasma Studied by in Situ Gas Phase and Surface Infrared Spectroscopy
4Atomic layer deposition of Ta-based thin films: Reactions of alkylamide precursor with various reactants
5Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
6Characteristics of Nickel Thin Film and Formation of Nickel Silicide by Remote Plasma Atomic Layer Deposition using Ni(iPr-DAD)2
7Characterization of plasma-enhanced atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide
8Charge trapping characteristics of Au nanocrystals embedded in remote plasma atomic layer-deposited Al2O3 film as the tunnel and blocking oxides for nonvolatile memory applications
9Comparative Studies of Atomic Layer Deposition and Plasma-Enhanced Atomic Layer Deposition Ta2O5 and the Effects on Electrical Properties of In situ Nitridation
10Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
11Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
12Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition
13Diffusion barrier properties of transition metal thin films grown by plasma-enhanced atomic-layer deposition
14Direct Plating of Cu on Pd Plasma Enhanced Atomic Layer Deposition Coated TaN Barrier
15Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film
16Fabrication and properties of AlN film on GaN substrate by using remote plasma atomic layer deposition method
17Fundamental beam studies of radical enhanced atomic layer deposition of TiN
18Growth of cubic-TaN thin films by plasma-enhanced atomic layer deposition
19In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
20In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition
21Inductively Coupled Hydrogen Plasma-Assisted Cu ALD on Metallic and Dielectric Surfaces
22Infrared study on room-temperature atomic layer deposition of HfO2 using tetrakis(ethylmethylamino)hafnium and remote plasma-excited oxidizing agents
23Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
24Low temperature depositions of GaN thin films by plasma-enhanced atomic layer deposition
25Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties
26Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
27Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
28On the determination of χ(2) in thin films: a comparison of one-beam second-harmonic generation measurement methodologies
29Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition
30Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
31Plasma enhanced atomic layer deposition of aluminum sulfide thin films
32Plasma enhanced atomic layer deposition of gallium sulfide thin films
33Plasma enhanced atomic layer deposition of zinc sulfide thin films
34Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
35Plasma Processing for Crystallization and Densification of Atomic Layer Deposition BaTiO3 Thin Films
36Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
37Plasma-Assisted Atomic Layer Deposition of Palladium
38Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
39Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
40Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering
41Plasma-enhanced ALD system for SRF cavity
42Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
43Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
44Plasma-enhanced atomic layer deposition of palladium on a polymer substrate
45Plasma-enhanced atomic layer deposition of tantalum thin films: the growth and film properties
46Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
47Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
48Plasma-enhanced atomic layer deposition of zinc phosphate
49Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
50Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
51Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors
52Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
53Robust TaNx diffusion barrier for Cu-interconnect technology with subnanometer thickness by metal-organic plasma-enhanced atomic layer deposition
54Room-Temperature Atomic Layer Deposition of Platinum
55Room-temperature plasma enhanced atomic layer deposition of aluminum silicate and its application in dye-sensitized solar cells
56Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
57Surface band bending and band alignment of plasma enhanced atomic layer deposited dielectrics on Ga- and N-face gallium nitride
58Surface Reaction Mechanisms during Ozone and Oxygen Plasma Assisted Atomic Layer Deposition of Aluminum Oxide
59Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide
60Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
61Synthesis of single-walled carbon nanotubes from atomic-layer-deposited Co3O4 and Co3O4/Fe2O3 catalyst films
62Temperature dependence of silicon nitride deposited by remote plasma atomic layer deposition
63The effect of plasma power on the properties of low-temperature silicon nitride deposited by RPALD for a gate spacer
64The Effects of Radio Frequency Plasma Power on Al2O3 Films Deposited at Room-Temperature by Remote Plasma Atomic Layer Deposition
65The Growth of Tantalum Thin Films by Plasma-Enhanced Atomic Layer Deposition and Diffusion Barrier Properties
66The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
67The physical properties of cubic plasma-enhanced atomic layer deposition TaN films
68The properties of Ru films deposited by remote plasma atomic layer deposition on Ar plasma-treated SiO2
69Thermal Stability of ALD HfO2 Thin Films and Interfacial Layers on the Oxynitride Underlayer Formed Using Remote Plasma
70Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
71Uniform GaN thin films grown on (100) silicon by remote plasma atomic layer deposition
72Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions


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