Custom Remote Inductively Coupled Plasma Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Custom Remote Inductively Coupled Plasma hardware returned 131 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Uniform GaN thin films grown on (100) silicon by remote plasma atomic layer deposition
2TaCN growth with PDMAT and H2/Ar plasma by plasma enhanced atomic layer deposition
3Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
4Infrared study on room-temperature atomic layer deposition of HfO2 using tetrakis(ethylmethylamino)hafnium and remote plasma-excited oxidizing agents
5Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
6Influence of Surface Temperature on the Mechanism of Atomic Layer Deposition of Aluminum Oxide Using an Oxygen Plasma and Ozone
7Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation
8Atomic layer deposition of cobalt phosphate thin films for the oxygen evolution reaction
9Interfacial Self-Cleaning during PEALD HfO2 Process on GaAs Using TDMAH/O2 with Different (NH4)2S Cleaning Time
10Plasma-Assisted Atomic Layer Deposition of Palladium
11The effects of nitrogen profile and concentration on negative bias temperature instability of plasma enhanced atomic layer deposition HfOxNy prepared by in situ nitridation
12Reaction Mechanisms during Atomic Layer Deposition of AlF3 Using Al(CH3)3 and SF6 Plasma
13Plasma enhanced atomic layer deposition and atomic layer etching of gallium oxide using trimethylgallium
14Si atomic layer epitaxy based on Si2H6 and remote He plasma bombardment
15Study on SiN and SiCN film production using PE-ALD process with high-density multi-ICP source at low temperature
16Uniformity of HfO2 Thin Films Prepared on Trench Structures via Plasma-Enhanced Atomic Layer Deposition
17Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
18Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors
19Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries
20Atomic layer deposition of Ta-based thin films: Reactions of alkylamide precursor with various reactants
21Inductively Coupled Hydrogen Plasma-Assisted Cu ALD on Metallic and Dielectric Surfaces
22Improvement of Vth Instability in Normally-Off GaN MIS-HEMTs Employing PEALD-SiNx as an Interfacial Layer
23Plasma-enhanced atomic layer deposition of palladium on a polymer substrate
24Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
25Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N2 or NH3 plasma
26Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma
27Plasma enhanced atomic layer deposition of aluminum sulfide thin films
28Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
29Plasma-enhanced atomic layer deposition of tantalum thin films: the growth and film properties
30The physical properties of cubic plasma-enhanced atomic layer deposition TaN films
31Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
32The effect of plasma power on the properties of low-temperature silicon nitride deposited by RPALD for a gate spacer
33Surface Reaction Mechanisms during Ozone and Oxygen Plasma Assisted Atomic Layer Deposition of Aluminum Oxide
34Characteristics of Thin Hf-Silicate Gate Dielectrics after Remote N2 and N2O Plasma Post-Treatments
35Plasma-enhanced ALD system for SRF cavity
36Effect of Process Parameters on Remote PEALD for Highly Transparent ZnO Film Growth
37Texture of atomic layer deposited ruthenium
38Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
39Charge trapping characteristics of Au nanocrystals embedded in remote plasma atomic layer-deposited Al2O3 film as the tunnel and blocking oxides for nonvolatile memory applications
40Electrical Properties of Atomic Layer Deposition HfO2 and HfOxNy on Si Substrates with Various Crystal Orientations
41Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy
42Remote Plasma Atomic Layer Deposition of SiNx Using Cyclosilazane and H2/N2 Plasma
43Characterization of plasma-enhanced atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide
44The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
45Fabrication and properties of AlN film on GaN substrate by using remote plasma atomic layer deposition method
46Comparison of AlF3 thin films grown by thermal and plasma enhanced atomic layer deposition
47Direct Plating of Cu on Pd Plasma Enhanced Atomic Layer Deposition Coated TaN Barrier
48Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
49Thermal Stability of ALD HfO2 Thin Films and Interfacial Layers on the Oxynitride Underlayer Formed Using Remote Plasma
50Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition
51The Growth of Tantalum Thin Films by Plasma-Enhanced Atomic Layer Deposition and Diffusion Barrier Properties
52Plasma Processing for Crystallization and Densification of Atomic Layer Deposition BaTiO3 Thin Films
53High temperature phase transformation of tantalum nitride films deposited by plasma enhanced atomic layer deposition for gate electrode applications
54Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
55Plasma-assisted atomic layer deposition of nickel oxide as hole transport layer for hybrid perovskite solar cells
56Surface band bending and band alignment of plasma enhanced atomic layer deposited dielectrics on Ga- and N-face gallium nitride
57In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
58Characterization of Molybdenum Oxide Thin Films Grown by Atomic Layer Deposition
59Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties
60Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films
61Remote Plasma Atomic Layer Deposition of Thin Films of Electrochemically Active LiCoO2
62Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
63Plasma enhanced atomic layer deposition of gallium sulfide thin films
64Thermal and Plasma-Enhanced ALD of Ta and Ti Oxide Thin Films from Alkylamide Precursors
65Atomic Layer Deposition of Silicon Nitride from Bis(tertiary-butyl-amino)silane and N2 Plasma Studied by in Situ Gas Phase and Surface Infrared Spectroscopy
66In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
67Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers
68Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
69Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
70The properties of Ru films deposited by remote plasma atomic layer deposition on Ar plasma-treated SiO2
71Plasma-enhanced atomic layer deposition of zinc phosphate
72In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition
73Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
74Robust TaNx diffusion barrier for Cu-interconnect technology with subnanometer thickness by metal-organic plasma-enhanced atomic layer deposition
75Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
76Room-Temperature Atomic Layer Deposition of Platinum
77Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
78Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions
79Temperature dependence of silicon nitride deposited by remote plasma atomic layer deposition
80The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
81Self-formation of dielectric layer containing CoSi2 nanocrystals by plasma-enhanced atomic layer deposition
82Characteristics of Nickel Thin Film and Formation of Nickel Silicide by Remote Plasma Atomic Layer Deposition using Ni(iPr-DAD)2
83Surface reactions of aminosilane precursors during N2 plasma-assisted atomic layer deposition of SiNx
84Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
85Fundamental beam studies of radical enhanced atomic layer deposition of TiN
86Surface chemistry of plasma-assisted atomic layer deposition of Al2O3 studied by infrared spectroscopy
87Atomic layer deposition of thin films as model electrodes: A case study of the synergistic effect in Fe2O3-SnO2
88Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
89Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
90Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
91Room-temperature plasma enhanced atomic layer deposition of aluminum silicate and its application in dye-sensitized solar cells
92The Effects of Radio Frequency Plasma Power on Al2O3 Films Deposited at Room-Temperature by Remote Plasma Atomic Layer Deposition
93Enhanced interfacial reaction of precursor and low temperature substrate in HfO2 atomic layer deposition with highly Ar diluted O2 plasma
94Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition
95Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
96The effects of plasma treatment on the thermal stability of HfO2 thin films
97Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature
98Understanding the effect of nitrogen plasma exposure on plasma assisted atomic layer epitaxy of InN monitored by real time grazing incidence small angle x-ray scattering
99Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
100On the determination of χ(2) in thin films: a comparison of one-beam second-harmonic generation measurement methodologies
101Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al2O3
102Shuffling Atomic Layer Deposition Gas Sequences to Modulate Bimetallic Thin Films and Nanoparticle Properties
103Synthesis of single-walled carbon nanotubes from atomic-layer-deposited Co3O4 and Co3O4/Fe2O3 catalyst films
104Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide
105Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
106Plasma enhanced atomic layer deposition of cobalt nitride with cobalt amidinate
107Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering
108Comparative Studies of Atomic Layer Deposition and Plasma-Enhanced Atomic Layer Deposition Ta2O5 and the Effects on Electrical Properties of In situ Nitridation
109Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition
110Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
111High-Voltage and Low-Leakage-Current Gate Recessed Normally-Off GaN MIS-HEMTs With Dual Gate Insulator Employing PEALD-SiNx/RF-Sputtered-HfO2
112Growth of controllable ZnO film by atomic layer deposition technique via inductively coupled plasma treatment
113Diffusion barrier properties of transition metal thin films grown by plasma-enhanced atomic-layer deposition
114Nanometer-Thick Conformal Pore Sealing of Self-Assembled Mesoporous Silica by Plasma-Assisted Atomic Layer Deposition
115Reaction mechanisms during plasma-assisted atomic layer deposition of metal oxides: A case study for Al2O3
116Tuning size and coverage of Pd nanoparticles using atomic layer deposition
117Synthesis and in situ characterization of low-resistivity TaNx films by remote plasma atomic layer deposition
118Experimental and theoretical determination of the role of ions in atomic layer annealing
119Growth of cubic-TaN thin films by plasma-enhanced atomic layer deposition
120Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
121Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
122Plasma-enhanced atomic layer deposition: Correlating O2 plasma parameters and species to blister formation and conformal film growth
123Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film
124Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
125Comparison of thermal, plasma-enhanced and layer by layer Ar plasma treatment atomic layer deposition of Tin oxide thin films
126Atomic Layer Deposition of Ruthenium and Ruthenium-oxide Thin Films by Using a Ru(EtCp)2 Precursor and Oxygen Gas
127Atomic Layer Deposition of Cobalt Using H2-, N2-, and NH3-Based Plasmas: On the Role of the Co-reactant
128Plasma enhanced atomic layer deposition of zinc sulfide thin films
129A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films
130Low temperature depositions of GaN thin films by plasma-enhanced atomic layer deposition
131Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation