Custom ICP Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Custom ICP hardware returned 52 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation
2	Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
3	Atomic Layer Deposition of Silicon Nitride from Bis(tertiary-butyl-amino)silane and N2 Plasma Studied by in Situ Gas Phase and Surface Infrared Spectroscopy
4	Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
5	Characteristics of Nickel Thin Film and Formation of Nickel Silicide by Remote Plasma Atomic Layer Deposition using Ni(iPr-DAD)2
6	Characterization of plasma-enhanced atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide
7	Charge trapping characteristics of Au nanocrystals embedded in remote plasma atomic layer-deposited Al2O3 film as the tunnel and blocking oxides for nonvolatile memory applications
8	Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
9	Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
10	Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition
11	Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film
12	Fabrication and properties of AlN film on GaN substrate by using remote plasma atomic layer deposition method
13	In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
14	Infrared study on room-temperature atomic layer deposition of HfO2 using tetrakis(ethylmethylamino)hafnium and remote plasma-excited oxidizing agents
15	Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
16	Low temperature depositions of GaN thin films by plasma-enhanced atomic layer deposition
17	Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties
18	Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
19	On the determination of χ(2) in thin films: a comparison of one-beam second-harmonic generation measurement methodologies
20	Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition
21	Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
22	Plasma enhanced atomic layer deposition of aluminum sulfide thin films
23	Plasma enhanced atomic layer deposition of zinc sulfide thin films
24	Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
25	Plasma Processing for Crystallization and Densification of Atomic Layer Deposition BaTiO3 Thin Films
26	Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
27	Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering
28	Plasma-enhanced ALD system for SRF cavity
29	Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
30	Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
31	Plasma-enhanced atomic layer deposition of palladium on a polymer substrate
32	Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
33	Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
34	Plasma-enhanced atomic layer deposition of zinc phosphate
35	Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
36	Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
37	Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors
38	Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
39	Room-Temperature Atomic Layer Deposition of Platinum
40	Room-temperature plasma enhanced atomic layer deposition of aluminum silicate and its application in dye-sensitized solar cells
41	Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
42	Surface band bending and band alignment of plasma enhanced atomic layer deposited dielectrics on Ga- and N-face gallium nitride
43	Surface Reaction Mechanisms during Ozone and Oxygen Plasma Assisted Atomic Layer Deposition of Aluminum Oxide
44	Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide
45	Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
46	Temperature dependence of silicon nitride deposited by remote plasma atomic layer deposition
47	The effect of plasma power on the properties of low-temperature silicon nitride deposited by RPALD for a gate spacer
48	The Effects of Radio Frequency Plasma Power on Al2O3 Films Deposited at Room-Temperature by Remote Plasma Atomic Layer Deposition
49	The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
50	The properties of Ru films deposited by remote plasma atomic layer deposition on Ar plasma-treated SiO2
51	Uniform GaN thin films grown on (100) silicon by remote plasma atomic layer deposition
52	Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions

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