Publication Information

Title:
Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
Type:
Journal
Info:
Chem. Mater. 2016, 28, 3435-3445
Date:
2016-04-27

Author Information

Name Institution
Thomas DobbelaereGhent University
Felix MattelaerGhent University
Jolien DendoovenGhent University
Philippe M VereeckenGhent University
Christophe DetavernierGhent University

Films


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Refractive Index
Analysis: Ellipsometry

Characteristic: Extinction Coefficient
Analysis: Ellipsometry

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Conformality, Step Coverage
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Chemical Composition, Impurities
Analysis: TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis

Characteristic: Electrochemical Performance
Analysis: CV, Cyclic Voltammetry

Characteristic: Charge Capacity
Analysis: Custom

Substrates

Si(100)
Micropillar Arrays
Pt

Keywords

Reaction Mechanism
Lithium-ion

Notes

899