Publication Information

Title: Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries

Type: Journal

Info: Chem. Mater. 2016, 28, 3435-3445

Date: 2016-04-27

DOI: http://dx.doi.org/10.1021/acs.chemmater.6b00853

Author Information

Name

Institution

Ghent University

Ghent University

Ghent University

Ghent University

Ghent University

Films

Plasma FePO4 using Custom ICP

Deposition Temperature Range = 150-350C

1316-98-9

512-56-1

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

J.A. Woollam M-2000

Refractive Index

Ellipsometry

J.A. Woollam M-2000

Extinction Coefficient

Ellipsometry

J.A. Woollam M-2000

Thickness

XRR, X-Ray Reflectivity

Bruker D8 Discover

Density

XRR, X-Ray Reflectivity

Bruker D8 Discover

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Bruker D8 Discover

Conformality, Step Coverage

SEM, Scanning Electron Microscopy

FEI Quanta 200 FEG

Chemical Composition, Impurities

EDS, EDX, Energy Dispersive X-ray Spectroscopy

FEI Quanta 200 FEG

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Thermo VG-Scientific theta probe

Chemical Composition, Impurities

TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis

-

Electrochemical Performance

CV, Cyclic Voltammetry

-

Charge Capacity

Custom

Custom

Substrates

Si(100)

Micropillar Arrays

Pt

Keywords

Reaction Mechanism

Lithium-ion

Notes

899



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