Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
Type:
Journal
Info:
Chem. Mater. 2016, 28, 3435-3445
Date:
2016-04-27
Author Information
| Name | Institution |
|---|---|
| Thomas Dobbelaere | Ghent University |
| Felix Mattelaer | Ghent University |
| Jolien Dendooven | Ghent University |
| Philippe M Vereecken | Ghent University |
| Christophe Detavernier | Ghent University |
Films
Plasma FePO4
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Refractive Index
Analysis: Ellipsometry
Characteristic: Extinction Coefficient
Analysis: Ellipsometry
Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Conformality, Step Coverage
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Chemical Composition, Impurities
Analysis: TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis
Characteristic: Electrochemical Performance
Analysis: CV, Cyclic Voltammetry
Characteristic: Charge Capacity
Analysis: Custom
Substrates
| Si(100) |
| Micropillar Arrays |
| Pt |
Notes
| Available as chapter 5 in on-line thesis: Plasma-enhanced atomic layer deposition of transition metal phosphates |
| 899 |