Publication Information

Title: Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions

Type: Journal

Info: Journal of Vacuum Science & Technology A 31, 01A147 (2013)

Date: 2012-12-05

DOI: http://dx.doi.org/10.1116/1.4772666

Author Information

Name

Institution

Ghent University

Ghent University

Ghent University

Films

Thermal Al2O3 using Custom ICP

Deposition Temperature = 65C

75-24-1

7732-18-5

Plasma Al2O3 using Custom ICP

Deposition Temperature = 65C

75-24-1

7782-44-7

Thermal ZnO using Custom ICP

Deposition Temperature = 65C

557-20-0

7732-18-5

Plasma ZnO using Custom ICP

Deposition Temperature = 65C

557-20-0

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Images

SEM, Scanning Electron Microscopy

FEI Quanta 200 FEG

Chemical Composition, Impurities

EDS, EDX, Energy Dispersive X-ray Spectroscopy

FEI Quanta 200 FEG

Chemical Composition, Impurities

XRF, X-Ray Fluorescence

Unknown

Wetting Angle

Contact Angle Measurement

Advex

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Unknown

Substrates

Polypropylene

PET, Polyethylene Terephthalate

Cotton

Keywords

Notes

674



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