Name

Institution

Felix Mattelaer

Ghent University

Philippe M Vereecken

Ghent University

Jolien Dendooven

Ghent University

Christophe Detavernier

Ghent University

Thermal MnO_x using Custom ICP

Deposition Temperature Range = 150-250C

Mn(TMHD)₃, tris(2,2,6,6-tetramethyl-3,5-heptanedionato) manganese

14324-99-3

Where to buy precursor

O₃, Ozone

10028-15-6

Plasma MnO_x using Custom ICP

Deposition Temperature = 180C

Mn(TMHD)₃, tris(2,2,6,6-tetramethyl-3,5-heptanedionato) manganese

14324-99-3

Where to buy precursor

H₂, Hydrogen

1333-74-0

Plasma MnO_x using Custom ICP

Deposition Temperature = 180C

Mn(TMHD)₃, tris(2,2,6,6-tetramethyl-3,5-heptanedionato) manganese

14324-99-3

Where to buy precursor

H₂O, Water

7732-18-5

Plasma Did Not Work using Custom ICP

Deposition Temperature = 180C

Mn(TMHD)₃, tris(2,2,6,6-tetramethyl-3,5-heptanedionato) manganese

14324-99-3

Where to buy precursor

N₂, Nitrogen

7727-37-9

Plasma Did Not Work using Custom ICP

Deposition Temperature = 180C

Mn(TMHD)₃, tris(2,2,6,6-tetramethyl-3,5-heptanedionato) manganese

14324-99-3

Where to buy precursor

O₂, Oxygen

7782-44-7

Plasma MnO_x using Custom ICP

Deposition Temperature Range = 140-280C

Mn(TMHD)₃, tris(2,2,6,6-tetramethyl-3,5-heptanedionato) manganese

14324-99-3

Where to buy precursor

NH₃, Ammonia

7664-41-7

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

J.A. Woollam M-2000

Thickness

XRR, X-Ray Reflectivity

Bruker D8 Discover

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Bruker D8 Discover

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

-

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Bruker Dimension Edge

Electrochemical Performance

Galvanostatic Cycling

Metrohm Autolab PGSTAT302

Electrochemical Performance

CV, Cyclic Voltammetry

Metrohm Autolab PGSTAT302

Unknown

XRF, X-Ray Fluorescence

-

SiO₂

TiN

Batteries

Lithium-ion

PEALD Film Development

N₂ plasma gave films with mostly C and N.

O₂ plasma gave non-uniform films without saturation up to 120 seconds.

317