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Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy
Innovative remote plasma source for atomic layer deposition for GaN devices
Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
Optical in situ monitoring of plasma-enhanced atomic layer deposition process
The role of active species in the N2 and N2-H2 RF afterglows on selective surface nitriding of ALD-grown TiO2 films
Where to buy Mn(TMHD)3, tris(2,2,6,6-tetramethyl-3,5-heptanedionato) manganese CAS# 14324-99-3
Mn(TMHD)3, tris(2,2,6,6-tetramethyl-3,5-heptanedionato) manganese CAS# 14324-99-3 is available from the following source(s):
| Number | Vendor | Region | Link |
|---|---|---|---|
| 1 | Gelest | 🇺🇸 | Manganese(III) 2,2,6,6-Tetramethyl-3,5-Heptanedionate |
| 2 | Strem Chemicals, Inc. | 🇺🇸 | Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)manganese(III), 99% [Mn(TMHD)3] |
| 3 | Ereztech | 🇺🇸 | Tris(2,2,6,6-tetramethyl-3,5-heptanedionato) manganese(III) |
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