Christophe Detavernier Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Christophe Detavernier returned 38 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-enhanced atomic layer deposition: Correlating O2 plasma parameters and species to blister formation and conformal film growth
2Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
3Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films
4Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
5Robust TaNx diffusion barrier for Cu-interconnect technology with subnanometer thickness by metal-organic plasma-enhanced atomic layer deposition
6Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy
7Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
8Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature
9Plasma enhanced atomic layer deposition of gallium sulfide thin films
10A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films
11Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor
12Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper
13Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions
14Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition
15A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
16Texture of atomic layer deposited ruthenium
17Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO4-precursor and H2-plasma
18Plasma enhanced atomic layer deposition of Ga2O3 thin films
19TaCN growth with PDMAT and H2/Ar plasma by plasma enhanced atomic layer deposition
20Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
21Plasma enhanced atomic layer deposition of aluminum sulfide thin films
22Manganese oxide films with controlled oxidation state for water splitting devices through a combination of atomic layer deposition and post-deposition annealing
23Tuning size and coverage of Pd nanoparticles using atomic layer deposition
24Atomic layer deposition of titanium nitride from TDMAT precursor
25Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
26Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N2 or NH3 plasma
27Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
28Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
29Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
30Plasma-enhanced atomic layer deposition of zinc phosphate
31Ru thin film grown on TaN by plasma enhanced atomic layer deposition
32Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
33Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
34Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
35Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
36Atomic layer deposition of thin films as model electrodes: A case study of the synergistic effect in Fe2O3-SnO2
37Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
38Plasma enhanced atomic layer deposition of zinc sulfide thin films