Christophe Detavernier Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Christophe Detavernier returned 38 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
2Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
3Ru thin film grown on TaN by plasma enhanced atomic layer deposition
4Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
5Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
6Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions
7Plasma enhanced atomic layer deposition of gallium sulfide thin films
8Plasma enhanced atomic layer deposition of zinc sulfide thin films
9Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films
10Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor
11Plasma-enhanced atomic layer deposition of zinc phosphate
12Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
13TaCN growth with PDMAT and H2/Ar plasma by plasma enhanced atomic layer deposition
14A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films
15Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
16Plasma enhanced atomic layer deposition of Ga2O3 thin films
17Robust TaNx diffusion barrier for Cu-interconnect technology with subnanometer thickness by metal-organic plasma-enhanced atomic layer deposition
18Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N2 or NH3 plasma
19Plasma-enhanced atomic layer deposition: Correlating O2 plasma parameters and species to blister formation and conformal film growth
20Plasma enhanced atomic layer deposition of aluminum sulfide thin films
21Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature
22Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
23Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
24Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy
25Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition
26A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
27Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO4-precursor and H2-plasma
28Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
29Atomic layer deposition of titanium nitride from TDMAT precursor
30Texture of atomic layer deposited ruthenium
31Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
32Tuning size and coverage of Pd nanoparticles using atomic layer deposition
33Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
34Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper
35Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
36Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
37Atomic layer deposition of thin films as model electrodes: A case study of the synergistic effect in Fe2O3-SnO2
38Manganese oxide films with controlled oxidation state for water splitting devices through a combination of atomic layer deposition and post-deposition annealing