Christophe Detavernier Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Christophe Detavernier returned 35 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films
2A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
3Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films
4Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper
5Atomic layer deposition of thin films as model electrodes: A case study of the synergistic effect in Fe2O3-SnO2
6Atomic layer deposition of titanium nitride from TDMAT precursor
7Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
8Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
9Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
10Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
11Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N2 or NH3 plasma
12Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
13Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
14Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
15Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
16Manganese oxide films with controlled oxidation state for water splitting devices through a combination of atomic layer deposition and post-deposition annealing
17Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition
18Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO4-precursor and H2-plasma
19Plasma enhanced atomic layer deposition of aluminum sulfide thin films
20Plasma enhanced atomic layer deposition of Ga2O3 thin films
21Plasma enhanced atomic layer deposition of gallium sulfide thin films
22Plasma enhanced atomic layer deposition of zinc sulfide thin films
23Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
24Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
25Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
26Plasma-enhanced atomic layer deposition of zinc phosphate
27Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
28Robust TaNx diffusion barrier for Cu-interconnect technology with subnanometer thickness by metal-organic plasma-enhanced atomic layer deposition
29Ru thin film grown on TaN by plasma enhanced atomic layer deposition
30Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy
31TaCN growth with PDMAT and H2/Ar plasma by plasma enhanced atomic layer deposition
32Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor
33Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
34Tuning size and coverage of Pd nanoparticles using atomic layer deposition
35Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions