Christophe Detavernier Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Christophe Detavernier returned 40 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Texture of atomic layer deposited ruthenium
2Plasma-enhanced atomic layer deposition: Correlating O2 plasma parameters and species to blister formation and conformal film growth
3TaCN growth with PDMAT and H2/Ar plasma by plasma enhanced atomic layer deposition
4Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy
5Ru thin film grown on TaN by plasma enhanced atomic layer deposition
6Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions
7Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature
8A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
9Plasma enhanced atomic layer deposition of aluminum sulfide thin films
10A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films
11Plasma enhanced atomic layer deposition of gallium sulfide thin films
12Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
13Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
14Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
15Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition
16Robust TaNx diffusion barrier for Cu-interconnect technology with subnanometer thickness by metal-organic plasma-enhanced atomic layer deposition
17Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
18Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films
19Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
20Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
21Atomic layer deposition of thin films as model electrodes: A case study of the synergistic effect in Fe2O3-SnO2
22Atomic layer deposition of titanium nitride from TDMAT precursor
23Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
24Manganese oxide films with controlled oxidation state for water splitting devices through a combination of atomic layer deposition and post-deposition annealing
25Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
26Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
27Plasma-enhanced atomic layer deposition of zinc phosphate
28Plasma enhanced atomic layer deposition of zinc sulfide thin films
29Tuning size and coverage of Pd nanoparticles using atomic layer deposition
30Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries
31Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO4-precursor and H2-plasma
32Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
33Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor
34Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N2 or NH3 plasma
35Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
36Plasma enhanced atomic layer deposition of Ga2O3 thin films
37Shuffling Atomic Layer Deposition Gas Sequences to Modulate Bimetallic Thin Films and Nanoparticle Properties
38Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper
39Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
40Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries