Christophe Detavernier Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Christophe Detavernier returned 27 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
2	Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper
3	Atomic layer deposition of titanium nitride from TDMAT precursor
4	Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
5	Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
6	Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
7	Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
8	Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
9	Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
10	Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
11	Manganese oxide films with controlled oxidation state for water splitting devices through a combination of atomic layer deposition and post-deposition annealing
12	Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition
13	Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO4-precursor and H2-plasma
14	Plasma enhanced atomic layer deposition of aluminum sulfide thin films
15	Plasma enhanced atomic layer deposition of Ga2O3 thin films
16	Plasma enhanced atomic layer deposition of gallium sulfide thin films
17	Plasma enhanced atomic layer deposition of zinc sulfide thin films
18	Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
19	Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
20	Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
21	Plasma-enhanced atomic layer deposition of zinc phosphate
22	Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
23	Robust TaNx diffusion barrier for Cu-interconnect technology with subnanometer thickness by metal-organic plasma-enhanced atomic layer deposition
24	Ru thin film grown on TaN by plasma enhanced atomic layer deposition
25	Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor
26	Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
27	Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions

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