Christophe Detavernier Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Christophe Detavernier returned 25 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
2Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper
3Atomic layer deposition of titanium nitride from TDMAT precursor
4Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
5Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
6Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
7Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
8Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
9Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
10Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
11Manganese oxide films with controlled oxidation state for water splitting devices through a combination of atomic layer deposition and post-deposition annealing
12Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition
13Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO4-precursor and H2-plasma
14Plasma enhanced atomic layer deposition of aluminum sulfide thin films
15Plasma enhanced atomic layer deposition of Ga2O3 thin films
16Plasma enhanced atomic layer deposition of zinc sulfide thin films
17Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
18Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
19Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
20Plasma-enhanced atomic layer deposition of zinc phosphate
21Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
22Ru thin film grown on TaN by plasma enhanced atomic layer deposition
23Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor
24Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
25Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions


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