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Christophe Detavernier Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Christophe Detavernier returned 40 record(s).

NumberTitle
1Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor
2Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper
3Shuffling Atomic Layer Deposition Gas Sequences to Modulate Bimetallic Thin Films and Nanoparticle Properties
4TaCN growth with PDMAT and H2/Ar plasma by plasma enhanced atomic layer deposition
5Robust TaNx diffusion barrier for Cu-interconnect technology with subnanometer thickness by metal-organic plasma-enhanced atomic layer deposition
6Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
7Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy
8Manganese oxide films with controlled oxidation state for water splitting devices through a combination of atomic layer deposition and post-deposition annealing
9Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
10Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO4-precursor and H2-plasma
11Plasma enhanced atomic layer deposition of gallium sulfide thin films
12Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
13Plasma enhanced atomic layer deposition of zinc sulfide thin films
14Atomic layer deposition of thin films as model electrodes: A case study of the synergistic effect in Fe2O3-SnO2
15Plasma enhanced atomic layer deposition of aluminum sulfide thin films
16Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
17Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films
18Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
19Atomic layer deposition of titanium nitride from TDMAT precursor
20Texture of atomic layer deposited ruthenium
21Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
22A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films
23Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition
24Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
25Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature
26Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
27Plasma-enhanced atomic layer deposition: Correlating O2 plasma parameters and species to blister formation and conformal film growth
28Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
29Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
30Plasma-enhanced atomic layer deposition of zinc phosphate
31Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
32Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
33A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
34Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions
35Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N2 or NH3 plasma
36Plasma enhanced atomic layer deposition of Ga2O3 thin films
37Ru thin film grown on TaN by plasma enhanced atomic layer deposition
38Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries
39Tuning size and coverage of Pd nanoparticles using atomic layer deposition
40Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor