Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
Publication Information
Title:
Plasma-enhanced atomic layer deposition of zinc phosphate
Type:
Journal
Info:
Journal of Non-Crystalline Solids Volume 444, 2016, Pages 43 - 48
Date:
2016-04-15
Author Information
Name | Institution |
---|---|
Thomas Dobbelaere | Ghent University |
Matthias M. Minjauw | Ghent University |
T. Ahmad | Ghent University |
Philippe M Vereecken | IMEC |
Christophe Detavernier | Ghent University |
Films
Plasma ZnPO4
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Substrates
Keywords
Notes
823 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |