Publication Information

Title:
Plasma-enhanced atomic layer deposition of zinc phosphate
Type:
Journal
Info:
Journal of Non-Crystalline Solids Volume 444, 2016, Pages 43 - 48
Date:
2016-04-15

Author Information

Name Institution
Thomas DobbelaereGhent University
Matthias M. MinjauwGhent University
T. AhmadGhent University
Philippe M VereeckenIMEC
Christophe DetavernierGhent University

Films


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Substrates

Keywords

Notes

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