Publication Information

Title: Plasma-enhanced atomic layer deposition of zinc phosphate

Type: Journal

Info: Journal of Non-Crystalline Solids Volume 444, 2016, Pages 43 - 48

Date: 2016-04-15

DOI: http://dx.doi.org/10.1016/j.jnoncrysol.2016.04.032

Author Information

Name

Institution

Thomas Dobbelaere

Ghent University

Matthias M. Minjauw

Ghent University

T. Ahmad

Ghent University

Philippe M Vereecken

IMEC

Christophe Detavernier

Ghent University

Films

Plasma ZnPO4 using Custom ICP

Deposition Temperature = 300C

DEZ, DiEthyl Zinc, ZnEt2, Zn(C2H5)2

557-20-0

Where to buy precursor

O2, Oxygen

7782-44-7

Trimethyl phosphate, TMP, (MeO)3PO

512-56-1

Where to buy precursor

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

Unknown

Substrates

Keywords

Notes

823


Mark Sowa

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