Trimethyl phosphate, TMP, (MeO)3PO , CAS# 512-56-1

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1EreztechTrimethyl phosphate

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 15 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
2Atomic Layer Deposition of Aluminum Phosphate Using AlMe3, PO(OMe)3, and O2 Plasma: Film Growth and Surface Reactions
3Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma
4Atomic layer deposition of cobalt phosphate thin films for the oxygen evolution reaction
5Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
6Plasma-Assisted ALD of LiPO(N) for Solid State Batteries
7Atomic Layer Deposition of the Solid Electrolyte LiPON
8Plasma-Assisted ALD of LiPO(N) for Solid State Batteries
9Solid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes
10Stabilization of Lithium Metal Anodes by Hybrid Artificial Solid Electrolyte Interphase
11Atomic Layer Deposition of Aluminum Phosphate Using AlMe3, PO(OMe)3, and O2 Plasma: Film Growth and Surface Reactions
12Effective Surface Passivation of InP Nanowires by Atomic-Layer-Deposited Al2O3 with POx Interlayer
13Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
14Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
15Plasma-enhanced atomic layer deposition of zinc phosphate