The publication database currently has 1700 entries.
Use Advanced Search for more complex searches
Innatiux is a retained executive recruiting firm with a focus on the search and placement of proven leaders for client companies in the field of high-tech capital equipment and analytical instrumentation. We are seeking WW technical and business leaders with a background in semiconductor deposition to fill confidential senior and executive level positions with our clients. Visit us at: www.innatiux.com
Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
Type:
Journal
Info:
J. Mater. Chem. A, 2017, 5, 330-338
Date:
2016-11-20
Author Information
| Name | Institution |
|---|---|
| Thomas Dobbelaere | Ghent University |
| Felix Mattelaer | Ghent University |
| Amit K. Roy | Ghent University |
| Philippe M Vereecken | IMEC |
| Christophe Detavernier | Ghent University |
Films
Plasma TiP2O7
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Chemical Composition, Impurities
Analysis: TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis
Substrates
| Si(100) |
| Micropillar Arrays |
| Pt |
Notes
| Available as chapter 6 in on-line thesis: Plasma-enhanced atomic layer deposition of transition metal phosphates |
| 962 |