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Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries

Type:
Journal
Info:
J. Mater. Chem. A, 2017, 5, 330-338
Date:
2016-11-20
DOI:
http://dx.doi.org/10.1039/C6TA04179E

Author Information

Name Institution
Thomas DobbelaereGhent University
Felix MattelaerGhent University
Amit K. RoyGhent University
Philippe M VereeckenIMEC
Christophe DetavernierGhent University

Films

Plasma TiP2O7

Hardware used: Custom Remote Inductively Coupled Plasma
Trimethyl phosphate, TMP, (MeO)3PO
CAS#: 512-56-1
TTIP, titanium(IV) isopropoxide, Ti(O-i-Pr)4
CAS#: 546-68-9
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 125-325C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: FEI Quanta 200 FEG

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: FEI Quanta 200 FEG

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Bruker D8 Discover

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Bruker D8 Discover

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: Bruker D8 Discover

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo VG-Scientific theta probe

Characteristic: Chemical Composition, Impurities
Analysis: TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis
Diagnostic: -

Substrates

Si(100)
Micropillar Arrays
Pt

Notes

Available as chapter 6 in on-line thesis: Plasma-enhanced atomic layer deposition of transition metal phosphates
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