Publication Information

Title:
Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
Type:
Journal
Info:
J. Mater. Chem. A, 2017, 5, 330-338
Date:
2016-11-20

Author Information

Name Institution
Thomas DobbelaereGhent University
Felix MattelaerGhent University
Amit K. RoyGhent University
Philippe M VereeckenIMEC
Christophe DetavernierGhent University

Films


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Chemical Composition, Impurities
Analysis: TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis

Substrates

Si(100)
Micropillar Arrays
Pt

Keywords

Lithium-ion
Batteries

Notes

962