Publication Information

Title: Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries

Type: Journal

Info: J. Mater. Chem. A, 2017, 5, 330-338

Date: 2016-11-20

DOI: http://dx.doi.org/10.1039/C6TA04179E

Author Information

Name

Institution

Ghent University

Ghent University

Ghent University

IMEC

Ghent University

Films

Plasma TiP2O7 using Custom ICP

Deposition Temperature Range = 125-325C

512-56-1

546-68-9

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

J.A. Woollam M-2000

Thickness

SEM, Scanning Electron Microscopy

FEI Quanta 200 FEG

Chemical Composition, Impurities

EDS, EDX, Energy Dispersive X-ray Spectroscopy

FEI Quanta 200 FEG

Thickness

XRR, X-Ray Reflectivity

Bruker D8 Discover

Density

XRR, X-Ray Reflectivity

Bruker D8 Discover

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Bruker D8 Discover

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Thermo VG-Scientific theta probe

Chemical Composition, Impurities

TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis

Unknown

Substrates

Si(100)

Micropillar Arrays

Pt

Keywords

Lithium-ion

Batteries

Notes

962



Shortcuts



© 2014-2018 plasma-ald.com