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Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
Type:
Journal
Info:
J. Vac. Sci. Technol. A 35(4), Jul/Aug 2017
Date:
2017-06-08
Author Information
| Name | Institution |
|---|---|
| Thomas Dobbelaere | Ghent University |
| Felix Mattelaer | Ghent University |
| Philippe M Vereecken | IMEC |
| Christophe Detavernier | Ghent University |
Films
Plasma VPO4
Plasma VPO4
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Refractive Index
Analysis: Ellipsometry
Characteristic: Extinction Coefficient
Analysis: Ellipsometry
Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Chemical Composition, Impurities
Analysis: TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis
Characteristic: Electrochemical Performance
Analysis: CV, Cyclic Voltammetry
Characteristic: Precursor Characterization
Analysis: Custom
Characteristic: Charge Capacity
Analysis: Charge/Discharge Cycling
Substrates
| Si(100) |
| Pt |
Notes
| Available as chapter 7 in on-line thesis: Plasma-enhanced atomic layer deposition of transition metal phosphates |
| 1122 |