Publication Information

Title: Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material

Type: Journal

Info: J. Vac. Sci. Technol. A 35(4), Jul/Aug 2017

Date: 2017-06-08

DOI: http://dx.doi.org/10.1116/1.4987131

Author Information

Name

Institution

Ghent University

Ghent University

IMEC

Ghent University

Films

Plasma VPO4 using Custom ICP

Deposition Temperature = 300C

5588-84-1

512-56-1

7782-44-7

Plasma VPO4 using Custom ICP

Deposition Temperature Range = 150-350C

791114-66-4

512-56-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

J.A. Woollam M-2000

Refractive Index

Ellipsometry

J.A. Woollam M-2000

Extinction Coefficient

Ellipsometry

J.A. Woollam M-2000

Thickness

XRR, X-Ray Reflectivity

Bruker D8 Advance

Density

XRR, X-Ray Reflectivity

Bruker D8 Advance

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

-

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Thermo VG-Scientific theta probe

Chemical Composition, Impurities

TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis

-

Electrochemical Performance

CV, Cyclic Voltammetry

-

Precursor Characterization

Custom

Custom

Charge Capacity

Constant Current Charge/Discharge Cycling

Custom

Substrates

Si(100)

Pt

Keywords

Batteries

Notes

1122



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