Publication Information

Title:
Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
Type:
Journal
Info:
J. Vac. Sci. Technol. A 35(4), Jul/Aug 2017
Date:
2017-06-08

Author Information

Name Institution
Thomas DobbelaereGhent University
Felix MattelaerGhent University
Philippe M VereeckenIMEC
Christophe DetavernierGhent University

Films



Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Refractive Index
Analysis: Ellipsometry

Characteristic: Extinction Coefficient
Analysis: Ellipsometry

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Chemical Composition, Impurities
Analysis: TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis

Characteristic: Electrochemical Performance
Analysis: CV, Cyclic Voltammetry

Characteristic: Precursor Characterization
Analysis: Custom

Characteristic: Charge Capacity
Analysis: Charge/Discharge Cycling

Substrates

Si(100)
Pt

Keywords

Batteries

Notes

1122