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Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material

Type:
Journal
Info:
J. Vac. Sci. Technol. A 35(4), Jul/Aug 2017
Date:
2017-06-08
DOI:
http://dx.doi.org/10.1116/1.4987131

Author Information

Name Institution
Thomas DobbelaereGhent University
Felix MattelaerGhent University
Philippe M VereeckenIMEC
Christophe DetavernierGhent University

Films

Plasma VPO4

Hardware used: Custom Remote Inductively Coupled Plasma
VTIP, vanadium (V) tri-i-propoxy oxide, VO(O-i-Pr)3
CAS#: 5588-84-1
Trimethyl phosphate, TMP, (MeO)3PO
CAS#: 512-56-1
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 300C

Plasma VPO4

Hardware used: Custom Remote Inductively Coupled Plasma
TEMAV, (EtMeN)4V, [(C2H5)(CH3)N]4V, Tetrakis(EthylMethylAmido) Vanadium, Vanadium Ethylmethylamide
CAS#: 791114-66-4
Trimethyl phosphate, TMP, (MeO)3PO
CAS#: 512-56-1
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 150-350C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000

Characteristic: Refractive Index
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000

Characteristic: Extinction Coefficient
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Bruker D8 Advance

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Bruker D8 Advance

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo VG-Scientific theta probe

Characteristic: Chemical Composition, Impurities
Analysis: TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis
Diagnostic: -

Characteristic: Electrochemical Performance
Analysis: CV, Cyclic Voltammetry
Diagnostic: -

Characteristic: Precursor Characterization
Analysis: Custom
Diagnostic: Custom

Characteristic: Charge Capacity
Analysis: Charge/Discharge Cycling
Diagnostic: Custom

Substrates

Si(100)
Pt

Notes

Available as chapter 7 in on-line thesis: Plasma-enhanced atomic layer deposition of transition metal phosphates
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