
Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
Type:
Journal
Info:
J. Vac. Sci. Technol. A 35(4), Jul/Aug 2017
Date:
2017-06-08
Author Information
Name | Institution |
---|---|
Thomas Dobbelaere | Ghent University |
Felix Mattelaer | Ghent University |
Philippe M Vereecken | IMEC |
Christophe Detavernier | Ghent University |
Films
Plasma VPO4
Plasma VPO4
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Refractive Index
Analysis: Ellipsometry
Characteristic: Extinction Coefficient
Analysis: Ellipsometry
Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Chemical Composition, Impurities
Analysis: TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis
Characteristic: Electrochemical Performance
Analysis: CV, Cyclic Voltammetry
Characteristic: Precursor Characterization
Analysis: Custom
Characteristic: Charge Capacity
Analysis: Charge/Discharge Cycling
Substrates
Si(100) |
Pt |
Notes
Available as chapter 7 in on-line thesis: Plasma-enhanced atomic layer deposition of transition metal phosphates |
1122 |